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Epitaxial Growth of Nb Films and Nb/Cu Bilayers on A12O3 Substrates by DC Magnetron Sputtering

Published online by Cambridge University Press:  10 February 2011

R. Loloee ,
M.A. Crimp ,
W. Zhu  and
W.P. Pratt Jr.
R. Loloee
Affiliation:
Department of Material Science & Mechanics, Michigan State University, East Lansing, MI 48824
M.A. Crimp
Affiliation:
Department of Material Science & Mechanics, Michigan State University, East Lansing, MI 48824
W. Zhu
Affiliation:
Department of Material Science & Mechanics, Michigan State University, East Lansing, MI 48824
W.P. Pratt Jr.
Affiliation:
Department of Physics & Astronomy, Michigan State University, East Lansing, MI 48824
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Abstract

Epitaxial single crystal Nb films have been grown by sputter deposition on (1 1 2 0) sapphire substrates. Subsequently, high quality epitaxial Cu films, with two orientation variants, have been grown onto the epitaxial Nb films. The sputtered films have been characterized using atomic force microscopy, electron backscattered patterns, and conventional transmission electron microscopy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 528: Symposia AA – Mechanisms & Principals of Epitaxial Growth in Metallic Systems , 1998 , 203
Copyright
Copyright © Materials Research Society 1998

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