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Effects of Acetylacetone Additions on PZT Thin Film Processing

Published online by Cambridge University Press:  15 February 2011

Robert W. Schwartz ,
R.A. Assink ,
D. Dimos ,
M.B. Sinclair ,
T.J. Boyle  and
C.D. Buchheit
Robert W. Schwartz
Affiliation:
Sandia National Laboratories The Advanced Materials Laboratory 1001, University Blvd. SE, Suite 100 Albuquerque, NM 87106
R.A. Assink
Affiliation:
Sandia National Laboratories The Advanced Materials Laboratory 1001, University Blvd. SE, Suite 100 Albuquerque, NM 87106
D. Dimos
Affiliation:
Sandia National Laboratories The Advanced Materials Laboratory 1001, University Blvd. SE, Suite 100 Albuquerque, NM 87106
M.B. Sinclair
Affiliation:
Sandia National Laboratories The Advanced Materials Laboratory 1001, University Blvd. SE, Suite 100 Albuquerque, NM 87106
T.J. Boyle
Affiliation:
Sandia National Laboratories The Advanced Materials Laboratory 1001, University Blvd. SE, Suite 100 Albuquerque, NM 87106
C.D. Buchheit
Affiliation:
Sandia National Laboratories The Advanced Materials Laboratory 1001, University Blvd. SE, Suite 100 Albuquerque, NM 87106
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Abstract

Sol-gel processing methods are frequently used for the fabrication of lead zirconate titanate (PZT) thin films for many electronic applications. Our standard approach for film fabrication utilizes lead acetate and acetic acid modified metal alkoxides of zirconium and titanium in the preparation of our precursor solutions. This report highlights some of our recent results on the effects of the addition of a second chelating ligand, acetylacetone, to this process. We discuss the changes in film drying behavior, densification and ceramic microstructure which accompany acetylacetone additions to the precursor solution and relate the observed variations in processing behavior to differences in chemical precursor structure induced by the acetylacetone ligand. Improvements in thin film microstructure, ferroelectric and optical properties are observed when acetylacetone is added to the precursor solution.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 361: Symposium I2 – Ferroelectric Thin Films IV , 1994 , 377
Copyright
Copyright © Materials Research Society 1995

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References

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