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Effect of As-Processed and Annealed Microstructures on the Mechanical Properties of Liga Ni MEMS

Published online by Cambridge University Press:  10 February 2011

Z. L. Xie ,
D. Pan ,
H. Last  and
K. J. Hemker
Z. L. Xie
Affiliation:
Dept. of Mechanical Engineering, The Johns Hopkins University, Baltimore, MD 21218
D. Pan
Affiliation:
Dept. of Mechanical Engineering, The Johns Hopkins University, Baltimore, MD 21218
H. Last
Affiliation:
Naval Surface Warfare Center, Indian Head Division, Indian Head, MD 20640
K. J. Hemker
Affiliation:
Dept. of Mechanical Engineering, The Johns Hopkins University, Baltimore, MD 21218
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Abstract

Microstructure – mechanical property relations of 200 μm thick LIGA deposited Ni films have been investigated with a combination of optical cross-sectional microscopy and microsample tensile testing. Measurements of the grain size and morphology of nine different asdeposited films evidenced a predominantly columnar microstructure with significant variations in grain size. These as-deposited microstructural variations resulted in a range of Young's modulus, yield strength, and ultimate tensile strength values that are consistent with previously reported measurements, but these values did not appear to scale with the as-deposited microstructures. By contrast, significant changes in both the microstructure and mechanical properties were observed when these films were annealed at 800'C for 1 hour. Recrystallization and grain growth transformed the grain morphology from columnar to equiaxed, which resulted in a dramatic decrease in the tensile strength and corresponding increase in the ductility of the annealed films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 197
Copyright
Copyright © Materials Research Society 2000

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