Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-07T22:55:40.380Z Has data issue: false hasContentIssue false
  • English
  • Français

Doped Amorphous SiC, Mixed Carbide and Oxycarbide Thin Films by a Liquid Route

Published online by Cambridge University Press:  26 February 2011

C-J Chu ,
E. Liimatta  and
J. D. Mackenzie
C-J Chu
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA90024
E. Liimatta
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA90024
J. D. Mackenzie
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA90024
Get access

Abstract

A new family of disordered materials called amorphous covalent ceramics (ACC) has been obtained by pyrolysis of metal-organic polymers. The transformation from polycarbosilane to amorphous and microcrystalline SiC has been studied. New a-SiC:H thin films have also been prepared by the polymer solution. Electrical and optical properties of this new a-SiC have studied. Amorphous binary carbide and oxycarbide have also been prepared by crosslinking polycarbosilane and metal alkoxides. The p-n control of this new a-SiC:H has been achieved, which also lead to the possible device applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 162: Symposium F – Diamond, Silicon Carbide and Related Wide Bandgap Semiconductors , 1989 , 421
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCE

1. Walker, B.E., Rice, R.W., Becher, P.F., Bender, B.A. and Coblenz, W.S., Bull. Am. Ceram. Soc. 62, 916 (1983)Google Scholar
2. Yajima, S., Hayashi, J. and Omori, M., Chem. Lett. 931 (1975).Google Scholar
3. Wynne, K.J. and Rice, R.W., Ann, Rev. Mater. Sci. 14, 297 (1984).Google Scholar
4. Tawada, Y., Kondo, M., Okamoto, H. and Hamakawa, Y., Solar Energy Mater. 6, 299 (1982).Google Scholar
5. Soraru, G.D., Babonneau, F. and Mackenzie, J.D., J. Non-Cryst. Solids 106, 256 (1988).Google Scholar
6. Liedtke, S., Jahn, K., Finger, F. and Fuhs, W., J. Non-Cryst. Solids 77&78, 849 (1985).Google Scholar
7. Davis, E.A. and Mott, N.F., Phil. Mag. 22, 903 (1970).Google Scholar
8. Babonneau, F., Soraru, G.D. and Mackenzie, J.D., in press in J. Mat. Science.Google Scholar