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Determination of the Plastic Behavior of Low Thermal Expansion Glass at the Nanometer Scale

Published online by Cambridge University Press:  11 February 2011

Richard Tejeda ,
Roxann Engelstad ,
Edward Lovell ,
Anthony Anderson ,
Dehua Yang  and
Kenneth Blaedel
Richard Tejeda
Affiliation:
University of Wisconsin Computational Mechanics Center, Madison, WI 53706
Roxann Engelstad
Affiliation:
University of Wisconsin Computational Mechanics Center, Madison, WI 53706
Edward Lovell
Affiliation:
University of Wisconsin Computational Mechanics Center, Madison, WI 53706
Anthony Anderson
Affiliation:
Hysitron Incorporated, Minneapolis, MN 55439
Dehua Yang
Affiliation:
Hysitron Incorporated, Minneapolis, MN 55439
Kenneth Blaedel
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA
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Abstract

The nanometer-scale plastic behavior of two low thermal expansion glasses (ULE® and Zerodur®) was determined through a combination of nanoindentation experiments and finite element modeling. The finite element models were then extended to investigate aspects of the performance of these materials as extreme ultraviolet lithography reticles.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 738: Symposium G – Spatially Resolved Characterization of Local Phenomena in Materials and Nanostructures , 2002 , G7.26
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

Tejeda, R., Engelstad, R., Lovell, E., and Blaedel, K., to appear in J. Vac. Sci. Technol. B (2002).Google Scholar
Oliver, W. and Pharr, G., J. Mater. Res. 7, p. 1564 (1992).Google Scholar