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Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

Published online by Cambridge University Press:  11 February 2011

Edward S. Kolesar ,
Matthew D. Ruff ,
William E. Odom ,
Joseph A. Jayachandran ,
Justin B. McAllister ,
Simon Y. Ko ,
Jeffery T. Howard ,
Peter B. Allen ,
Josh M. Wilken  and
Noah C. Boydston
...Show all authors
Edward S. Kolesar
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Matthew D. Ruff
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
William E. Odom
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Joseph A. Jayachandran
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Justin B. McAllister
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Simon Y. Ko
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Jeffery T. Howard
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Peter B. Allen
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Josh M. Wilken
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Noah C. Boydston
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Jorge E. Bosch
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Richard J. Wilks
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
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Abstract

This research focuses on the design and experimental characterization of two types of MEMS asymmetrical electrothermal microactuators. Both microactuator design variants use resistive (Joule) heating to generate thermal expansion and movement. Deflection and force measurements of both microactuators as a function of applied electrical power are presented. Also described is the practical integration of the electrothermal microactuators in a monolithic microengine that is capable of rotating a set of gears.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J5.3
Copyright
Copyright © Materials Research Society 2003

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References

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