Hostname: page-component-745bb68f8f-grxwn Total loading time: 0 Render date: 2025-02-04T17:45:28.101Z Has data issue: false hasContentIssue false
  • English
  • Français

Crystallization of Molybdenum Disulfide Films Deposited by Pulsed Laser Ablation

Published online by Cambridge University Press:  26 February 2011

J. S. Zabinski ,
M. S. Donley ,
P. J. John ,
V. J. Dyhouse ,
A. J. Safriet  and
N. T. McDevitt
J. S. Zabinski
Affiliation:
WRDC/MLBT, Materials Laboratory, Wright-Patterson AFB, OH 45433–6533
M. S. Donley
Affiliation:
WRDC/MLBT, Materials Laboratory, Wright-Patterson AFB, OH 45433–6533
P. J. John
Affiliation:
University of Dayton Research Institute, Dayton, OH 45469–0168
V. J. Dyhouse
Affiliation:
University of Dayton Research Institute, Dayton, OH 45469–0168
A. J. Safriet
Affiliation:
University of Dayton Research Institute, Dayton, OH 45469–0168
N. T. McDevitt
Affiliation:
RAMSPEC Research, 4399 E. Mohave Dr., Dayton, OH 45431
Get access

Abstract

Pulsed laser ablation (PLA) is an emerging technology that provides a mechanism to deposit lubricious films and to tailor film properties by the appropriate choice of substrate materials, deposition parameters and post deposition treatments. The properties of MoS2 films deposited by PLA are evaluated as a function of: (1) substrate material, (2) duration of post deposition annealing treatments using 248 nm laser radiation and (3) substrate temperature during deposition. The chemistry and crystal structure of the different films are determined using small angle X-ray diffraction (XRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectroscopy (RBS). The tribological properties of the films are then evaluated as a function of their chemistry and crystal structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 195
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Clauss, F.J., Solid Lubricants and Self-Lubricating Solids, (Academic Press, New York, 1972).Google Scholar
2. Spalvins, T., ASLE Trans., 12, 36 (1969).Google Scholar
3. Christy, R.I. and Ludwig, H.R., Thin Solid Films, 64, 223 (1979).Google Scholar
4. Dimigen, H., Hubsch, H., and Willich, P., Thin Solid Films, 64, 221 (1979).Google Scholar
5. Christy, R.I., Thin Solid Films. 73, 299 (1980).Google Scholar
6. Stupp, Bernard C., Thin Solid Films, 84, 257 (1981).Google Scholar
7. Buck, V., Wear, 91, 281 (1983).Google Scholar
8. Buck, V., Thin Solid Films, 139, 157 (1986).Google Scholar
9. Buck, V., Wear, 114, 263 (1987).Google Scholar
10. Lince, Jeffrey R., J. Mater. Res., 5(1). 218 (1990).Google Scholar
11. Pierce, Daniel E., Burns, Richard P., Dauplaise, Helen M., and Mizerka, Lawrence J., U.S. Army Materials Technology Laboratory. Report # MTL TR 90–39 (1990).Google Scholar
12. Lince, J.R. and Fleischauer, P.D., J. Mater. Res., 2, 827 (1987).Google Scholar
13. Fleischauer, P.D., ASLE Trans., 27, 82 (1984).Google Scholar
14. Matsunaga, M., Homma, T., and Tanaka, A., ASLE Trans., 25, 323 (1982).Google Scholar
15. Spalvins, T., J. Vac. Sci. Technol. A. 5(2), 212 (1987).Google Scholar
16. Muller, C., Menoud, C., Maillat, M., and Hintermann, H.E., Surf. and Coatings Technol., 36, 351 (1988).Google Scholar
17. Bolster, R.N., Singer, I.L., Wegand, J.C., Fayeulle, S. and Gosset, C.R., presented at the ICMCTF-90, San Diego, CA 1990.Google Scholar
18. Kuwano, Hiroki and Nagai, Kazutoshi, J. Vac. Sci. and Technol. A, 4(6), 2993 (1986).Google Scholar
19. Kuwano, Hiroki and Nagai, Kazutoshi, J. Vac. Sci. and Technol. A, 3(4), 1809 (1985).Google Scholar
20. Donley, M.S., Murray, P.T., Barber, S.A. and Haas, T.W., Surf. and Coatings Technol., 36, 329 (1988).Google Scholar
21. Donley, M.S., Murray, P.T. and McDevitt, N.T. in New Materials Approaches to Tribology, edited by Pope, L.E., Fehrenbacher, L.L. and Winer, W.O., (Mater. Res. Soc. Proc. 40, Boston, MA 1989) pp. 277–282.Google Scholar
22. Muilenberg, G.E., ed., Handbook of X-ray Photoelectron Spectroscopy, Perkin Elmer Corporation, 1979.Google Scholar