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Computer Simulation of Cluster Ion Impacts on a Solid Surface

Published online by Cambridge University Press:  10 February 2011

Z. Insepov  and
I. Yamada
Z. Insepov
Affiliation:
Ion Beam Engineering Experimental Lab., Kyoto University, Sakyo, Kyoto 606-01Japan, [email protected]
I. Yamada
Affiliation:
Ion Beam Engineering Experimental Lab., Kyoto University, Sakyo, Kyoto 606-01Japan, [email protected]
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Abstract

The sputtering probabilities for normal and oblique cluster ion impacts were calculated by the use of two-dimensional molecular dynamics (MD) calculations. These simulations have revealed the angular dependence of ejecting surface atoms on the cluster incidence angle. The ejecting flux has a symmetrical form with an essential lateral component in the case of normal cluster incidence. For an oblique cluster indidence we found a sharp asymmetry of sputtering orientation. We obtained that the ejecting flux consists of three components: a) fast flying atoms with the velocities higher than the cluster velocity ν ∼ 2.3ν0, b) approximately self-similar component with ν ≈ ν0, and, finally, c) slowly moving tail with ν ≈ 0.2ν0, where ν0 is the cluster velocity. According to our MD results we developed a new model of surface modification phenomena which consists of the Langevin Dynamics based on the Kardar-Parisi-Zhang equation, combined with a Monte-Carlo procedure for crater formation at normal and oblique cluster impacts. We obtained that for a symmetrical crater shape with a size in the order of 20 Å, a significant smoothing occurs after irradiation by ∼ 103 cluster impacts which has been supported by experiment at dose of ∼ 1014 ion/cm2. The rate of the smoothing process can be significantly accelerated if the lateral sputtering phenemenon is taken into account. Simulation of oblique cluster impact on a surface at a grazing angle of 30° by constructing of asymmetric crater shape gives an opposite result: the surface roughness increases. The latter obtaining qualitatively agrees with the experiment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 408: Symposium P – Materials Theory, Simulations, and Parallel Algorithms , 1995 , 591
Copyright
Copyright © Materials Research Society 1996

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