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Compliant MEMS Motion Characterization by Nanoindentation

Published online by Cambridge University Press:  01 February 2011

Joseph Choueifati ,
Craig Lusk ,
Xialou Pang  and
Alex A. Volinsky
Joseph Choueifati
Affiliation:
[email protected], USF, Mechanical engineering, 8413 maple flower lane, tampa, FL, 33614, United States
Craig Lusk
Affiliation:
[email protected], University of South Florida, Mechanical Engineering, Tampa, FL, 33620, United States
Xialou Pang
Affiliation:
[email protected], University of South Florida, Mechanical Engineering, Tampa, FL, 33620, United States
Alex A. Volinsky
Affiliation:
[email protected], University of South Florida, Mechanical Engineering, Tampa, FL, 33620, United States
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Abstract

Large out-of-plane displacements can be achieved when compliant mechanisms are utilized in MEMS. While mathematical and macroscopic modeling is helpful in building original designs, the actual MEMS device motion needs to be characterized in terms of the forces and displacements. A nanoindentation apparatus equipped with Berkovich diamond tip was used in an attempt to actuate and characterize the motion of the Bistable Spherical Compliant Micromechanism with a nonlinear (approximately cubic) mechanical response. Based on the obtained lateral force-displacement data it was concluded that the Berkovich diamond tip was too sharp, thus cutting through the polysilicon material of the MEMS device.

Keywords

microelectro-mechanical (MEMS)fracturestrength
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD06-24
Copyright
Copyright © Materials Research Society 2008

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