Published online by Cambridge University Press: 26 February 2011
Measurements of the depletions of the feedstock gases in monosilane-germane and disilane-germane rf discharges indicate that the dissociation rates of germane and monosilane differ by a factor of 2 whereas the dissociation rates of germane and disilane differ by a factor of 0.8. As a result, larger germane concentrations are required in disilane-germane than in monosilane-germane discharges in order to achieve equal germanium content in the resulting films.