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Combinatorial Studies of Switching and Solid-Phase Crystallization in Amorphous Silicon

Published online by Cambridge University Press:  26 February 2011

Paul Stradins ,
Howard M. Branz ,
Jian Hu ,
Scott Ward  and
Qi Wang
Paul Stradins
Affiliation:
[email protected], NREL, 1617 Cole Blvd., Golden, CO, 80401, United States
Howard M. Branz
Affiliation:
[email protected], National Renewable Energy Laboratory, United States
Jian Hu
Affiliation:
[email protected], National Renewable Energy Laboratory, United States
Scott Ward
Affiliation:
[email protected], National Renewable Energy Laboratory, United States
Qi Wang
Affiliation:
[email protected], National Renewable Energy Laboratory, United States
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Abstract

Combinatorial approaches are successfully applied for the optimization of electric write-once, thin-film Si antifuse memory devices, as well as for studying the solid-phase epitaxy kinetics of amorphous silicon on c-Si. High forward, low reverse current thin film Si diode deposition recipes are selected using cross-strips of different combinations of amorphous and microcrystalline doped layers, as well as a thickness-wedged intrinsic a-Si:H buffer layer. By studying switching in thickness-wedged a-Si:H layers, it is found that switching requires both a critical field and a critical bias voltage across the metallic contacts. Solid-phase epitaxy speed has a non-linear dependence on the film thickness, which is easily observed by optical image monitoring and analysis in wedged a-Si:H films on c-Si wafers.

Keywords

combinatorial synthesismemorySi
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 894: Symposium LL – Combinatorial Methods and Informatics in Materials Science , 2005 , 0894-LL02-01
Copyright
Copyright © Materials Research Society 2006

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References

REFERENCES

1. Hanak, J. J., J. Mater. Sci. 5 (1970) 964.Google Scholar
2. Xiang, X. D., Schultz, P. G., Physica C 282 (1997) 428.Google Scholar
3. Wang, Q., Perkins, J., Branz, H. M., Alleman, J., Duncan, C., Ginley, D., Applied Surface Science, 189 (2002) 271.Google Scholar
4. Wang, Q., Ward, S., Duda, A., Hu, J., Stradins, P., Crandall, R. S., and Branz, H.M., Applied Physics Letters, 85 (2004) 21222.Google Scholar
5. Wang, Q., Ward, S., Duda, A., Hu, J., Stradins, P., Crandall, R. S., Branz, H. M., Jeffrey, F., Lou, H., Perlov, C., Jackson, W. B., Mei, P. and Taussig, C., Mat. Res. Soc. Proc. 862 (2005) 709.Google Scholar
6. Stradins, P., Branz, H. M., Jackson, W. B., Crandall, R. S., Hu, J., and Wang, Q.. Mat. Res. Soc. Proc. 808 (2004) 465.Google Scholar
7. Stradins, P., Young, D., Branz, H. M., Page, M. and Wang, Q., Mat. Res. Soc. Proc. 862 (2005) 227.Google Scholar
8. Lecomber, P. G., Owen, A. E., Spear, W. E., Hajto, J., Snell, A. J., Choi, W. K., Rose, M. J. and Reynolds, S., J. Non-Cryst. Solids 77–8 (1985) 1373.Google Scholar
9. Fuhs, W., Gall, S., Rau, B., Schmidt, M. and Schneider, J., Sol. Energy 77 (2004) 961.Google Scholar
10. Aberle, A. G., Straub, A., Widenborg, P. I., Sproul, A. B., Huang, Y. and Campbell, P., Prog. Photovoltaics 13 (2005) 37.Google Scholar
11. Branz, H. M., Teplin, C. W., Jones, K. M., Al-Jassim, M. M., Dabney, M., Iwaniczko, E., Stradins, P., and Ginley, D. S., 21st International Conference on the Amorphous and Nanocrystaline Semiconductors, Lisbon, 2005, submitted to J. of Non-Crystalline Solids.Google Scholar
12. Wang, Q., Tessler, L. R., Moutinho, H., To, B., Perkins, J., Han, D., Ginley, D. and Branz, H. M., Mat. Res. Soc. Proc. 762 (2003) A9.1.2.Google Scholar
13. Stradins, P., Jackson, W. B., Branz, H. M., Hu, J., Perkins, C. L. and Wang, Q., Mat. Res. Soc. Proc. 762 (2003) A2.4.Google Scholar
14. Bauer, M., Oehme, M., Sauter, M., Eifler, G. and Kasper, E., Thin Solid Films 364 (2000) 238.Google Scholar