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CMOS Compatible Growth of Carbon Nanotubes and Their Application in Field-Effect Transistors

Published online by Cambridge University Press:  22 February 2012

T. Uchino ,
G. N. Ayre ,
D. C. Smith ,
J. L. Hutchison ,
C. H. de Groot  and
P. Ashburn
T. Uchino
Affiliation:
Department of Electronics and Intelligent Systems, Tohoku Institute of Technology, Sendai, 982-8577, Japan School of Electronics and Computer Science, University of Southampton, Southampton SO17 1BJ, U.K.
G. N. Ayre
Affiliation:
School of Physics and Astronomy, University of Southampton, Southampton SO17 1BJ, U.K.
D. C. Smith
Affiliation:
School of Physics and Astronomy, University of Southampton, Southampton SO17 1BJ, U.K.
J. L. Hutchison
Affiliation:
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K.
C. H. de Groot
Affiliation:
School of Electronics and Computer Science, University of Southampton, Southampton SO17 1BJ, U.K.
P. Ashburn
Affiliation:
School of Electronics and Computer Science, University of Southampton, Southampton SO17 1BJ, U.K.
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Abstract

The metal-catalyst-free growth of carbon nanotubes (CNTs) using chemical vapor deposition and the application in field-effect transistors (FETs) is presented. The CNT growth process used a 3-nm-thick Ge layer on SiO2 that was subsequently annealed to produce Ge nanoparticles. Raman measurements show the presence of radial breathing mode (RBM) peaks and the absence of the disorder induced D-band, indicating single walled CNTs (SWNTs) with a low defect density. The synthesized CNTs are used to fabricate CNTFETs and the best device has a state-of-the-art on/off current ratio of 3×108 and a steep sub-threshold slope of 110 mV/decade.

Keywords

nanostructuredeviceschemical vapor deposition (CVD) (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1407: Symposium AA – Carbon Nanotubes, Graphene and Related Nanostructures , 2012 , mrsf11-1407-aa15-28
Copyright
Copyright © Materials Research Society 2012

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