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CdS/CdTe Solar Cells Made by High-Rate Magnetron Sputtering

Published online by Cambridge University Press:  01 February 2011

Victor Plotnikov  and
Alvin Compaan
Victor Plotnikov
Affiliation:
[email protected], The University of Toledo, Physics and Astronomy, Department of Physics and Astronomy, mail drop 111, The University of Toledo, Toledo, OH, 43606, United States
Alvin Compaan
Affiliation:
[email protected], The University of Toledo, Physics and Astronomy, Toledo, OH, 43606, United States
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Abstract

The dependence of deposition rate of CdTe film on deposition pressure and RF power has been studied. The optimum argon pressure was found to be 5 mTorr while the growth rate as a function of power is slightly superlinear. A deposition rate of 140 nm/min has been achieved which is five times faster than for our conventional deposition conditions. Films were characterized by means of X-ray diffraction (XRD) and Atomic Force Microscopy (AFM). Pressure has been found to have a greater effect on film morphology than magnetron sputter power. Working devices have been made with 2-micron layers of CdTe deposited at different powers and 10 mTorr of argon pressure. The effect of different temperatures of CdCl2 post-deposition treatment on cell performance was studied. Efficiency of 11.8% with a 2-micron CdTe layer deposited at 133 nm/min was achieved.

Keywords

photovoltaicsputteringthin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1012: Symposium Y – Thin-Film Compound Semiconductor Photovoltaics-2007 , 2007 , 1012-Y12-28
Copyright
Copyright © Materials Research Society 2007

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References

1. Batzner, D.L., Romeo, A., Terheggen, M., Dobeli, M., Zogg, H. and Tiwari, A.N.. Thin Solid Films, 451, (2004).Google Scholar
2.AJA International, Inc, PO Box 246, Scituate, N., MA, 02066.Google Scholar
3. McCandless, B., Sites, J., in Handbook of Photovoltaic Science and Engineering, edited by Luque, A., Hegedus, S.. (John Wiley and Sons, 2003) pp. 633–637 Google Scholar
4. Shao, M.. PhD. Thesis. The University of Toledo, 1995.Google Scholar