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Atomic Layer Deposition of TiO2 ultrathin films on 3D substrates for energy applications

Published online by Cambridge University Press:  18 May 2012

Audrey Soum-Glaude ,
Liang Tian ,
Elisabeth Blanquet ,
Virginie Brizé ,
Laurent Cagnon ,
Gaël Giusti ,
Rached Salhi ,
Stéphane Daniele ,
Céline Ternon  and
Daniel Bellet
Audrey Soum-Glaude
Affiliation:
Laboratory of PROcesses, Materials, Solar Energy (PROMES-CNRS), 7 rue du Four Solaire, 66120 Font-Romeu Odeillo, France
Liang Tian
Affiliation:
Laboratory of Science and Engineering of MAterials and Processes (SIMAP), 1130 rue de la Piscine, BP 75, 38402 Saint Martin d’Hères Cedex, France
Elisabeth Blanquet
Affiliation:
Laboratory of Science and Engineering of MAterials and Processes (SIMAP), 1130 rue de la Piscine, BP 75, 38402 Saint Martin d’Hères Cedex, France
Virginie Brizé
Affiliation:
Laboratory of Science and Engineering of MAterials and Processes (SIMAP), 1130 rue de la Piscine, BP 75, 38402 Saint Martin d’Hères Cedex, France
Laurent Cagnon
Affiliation:
Institute Néel, CNRS/UJF, 25 rue des Martyrs, BP 166, 38042 Grenoble cedex 9, France
Gaël Giusti
Affiliation:
Laboratory of Materials and Physical Engineering (LMGP), Grenoble INP Minatec, BP 257, 3 parvis Louis Néel, 38016 Grenoble, France
Rached Salhi
Affiliation:
Laboratory of Science and Engineering of MAterials and Processes (SIMAP), 1130 rue de la Piscine, BP 75, 38402 Saint Martin d’Hères Cedex, France
Stéphane Daniele
Affiliation:
Institute of Research on Catalysis and Environment of Lyon (IRCELYON), 2 avenue Albert Einstein, 69626 Villeurbanne cedex, France
Céline Ternon
Affiliation:
Laboratory of Technologies of Microelectronics (LTM), CEA-LETI/DTS, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France
Daniel Bellet
Affiliation:
Laboratory of Materials and Physical Engineering (LMGP), Grenoble INP Minatec, BP 257, 3 parvis Louis Néel, 38016 Grenoble, France
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Abstract

In the present global environmental context, it becomes more and more critical to find efficient solutions to lower our energy consumption on one hand, and to produce energy from clean renewable sources on the other hand. Consequently, research efforts on materials for energy applications are intensifying.

The present work aims at developing optoelectrical components usable for both energy saving (light emitting diodes) and renewable energy production (solar cells) by fabricating p-n heterojunctions based on a single semiconductor, titanium dioxide. TiO2 is indeed a very promising candidate: it is chemically and physically stable under irradiation, transparent to visible and near-infrared light (Eg= 3 – 3.5 eV), presents photocatalytic activity, is non-toxic and low cost, which permits to envisage its large scale use.

In the present paper, the proposed architecture for both solar cells and LEDs is original as well as common for both applications: a three-dimensional architecture based on an anodic alumina nanoporous membrane which serves as nanomask for TiO2 growth in order to enlarge the effective surface of the components. TiO2is synthesized by Atomic Layer Deposition (ALD), a technique particularly well adapted to the deposition of ultrathin films (from one monolayer to few tens of nanometers) on 3D porous substrates patterned with high aspect ratio nanopores.

In this work, the capacity of synthesizing 3D nanostructures is demonstrated. TiO2ultrathin films (10 to 100 nm) were grown by ALD on flat, micropatterned, microporous and nanoporous anodic alumina membranes (AAM) substrates. The films were highly conformal, as confirmed by SEM and TEM imaging. Both EDS and XPS analyses validated the dioxide film stoichiometry.

Keywords

atomic layer depositionnanostructureoxide
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1439: Symposium N/AA – Nanowires and Nanotubes-Synthesis, Properties, Devices, and Energy Applications of One-Dimensional Materials , 2012 , pp. 63 - 68
Copyright
Copyright © Materials Research Society 2012

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References

REFERENCES

Masuda, H. and Fukuda, K., Science 268, 1466 (1995).CrossRefGoogle Scholar
Ritala, M., Leskelä, M., Niinistö, L. and Haussalo, P., Chem. Mater. 5, 1174 (1993).CrossRefGoogle Scholar
Kukli, K., Aidla, A., Aarik, J., Schuisky, M., Hårsta, A., Ritala, M., Leskelä, M., Langmuir 16, 8122 (2000).CrossRefGoogle Scholar
Pore, V., Rahtu, A., Leskelä, M., Ritala, M., Sajavaara, T. and Keinonen, J., Chem. Vap. Deposition 10, 143 (2004).CrossRefGoogle Scholar
Da Col, S., Darques, M., Fruchart, O. and Cagnon, L., Applied Physics Letters 98, 112501 (2011).CrossRefGoogle Scholar
Lintanf-Salaün, A., Mantoux, A., Djurado, E. and Blanquet, E., Microelec. Engin. 87, 373 (2010).CrossRefGoogle Scholar
Ritala, M., Leskelä, M. and Rauhala, E., Chem. Mater. 6, 556 (1994).CrossRefGoogle Scholar
Moulder, J.F., Stickle, W.F., Sobol, P.E. and Bomben, K.D., Handbook of X-ray Photoelectron Spectroscopy (2nd edition), ed. Chastain, J., Perkin-Elmer: MN, 1992 (published by Physical Electronics, Inc.)Google Scholar
Mishra, S., Jeanneau, E., Berger, M.-H., Hochepied, J.-F., Daniele, S., Inorg. Chem. 49, 11184 (2010).CrossRefGoogle Scholar
Pore, V., Heikkilä, M., Ritala, M., Leskelä, M. and Areva, S., J. of Photochem. & Photobiol. A: Chem. 177, 68 (2006).CrossRefGoogle Scholar