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Anisotropic Dynamic Strain Sensors Based on Ferroelectric PZT Films

Published online by Cambridge University Press:  15 February 2011

A.A. Bakirov ,
E.V. Sviridov  and
V.P. Dudkevich
A.A. Bakirov
Affiliation:
Institute of Physics, Stachky ave. 194, Rostov-on-Don, 344104, Russia
E.V. Sviridov
Affiliation:
Institute of Physics, Stachky ave. 194, Rostov-on-Don, 344104, Russia
V.P. Dudkevich
Affiliation:
Institute of Physics, Stachky ave. 194, Rostov-on-Don, 344104, Russia
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Abstract

The present paper deals with anisotropie dynamic strain sensors based on polycrystalline Pb(Zr0.53Ti0.45W0.01Cd0.01)O3 films. The films were deposited on ceramic substrates designed to operate at radiofrequencies. The planar interdigitated Al electrodes were deposited on the film surfaces. To pole the films the sawtooth monopolar pulses of the amplitude ranging from 5 · 107 to 8 · 107 V/m were used during the heating of the films from room temperature to 300 °C and the following cooling down to room temperature (Tc = 360 °C).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 361: Symposium I2 – Ferroelectric Thin Films IV , 1994 , 613
Copyright
Copyright © Materials Research Society 1995

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References

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