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A new experimental approach for evaluating the mechanical integrity of interfaces between hard coatings and substrates

Published online by Cambridge University Press:  22 January 2014

Ke Chen ,
Yang Mu  and
W.J. Meng
Ke Chen
Affiliation:
Department of Mechanical and Industrial Engineering, Louisiana State University, Baton Rouge, Louisiana 70803
Yang Mu
Affiliation:
Department of Mechanical and Industrial Engineering, Louisiana State University, Baton Rouge, Louisiana 70803
W.J. Meng*
Affiliation:
Department of Mechanical and Industrial Engineering, Louisiana State University, Baton Rouge, Louisiana 70803
*
Address all correspondence to W.J. Meng at[email protected]
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Abstract

We describe a new protocol for testing coating/substrate interfacial failures through compression loading of micro-pillars containing an inclined interface region, experimentally realized in the TiN/Ti/Si(100) system. Interfacial failures were achieved through direct compression loading in the axial direction, which yielded reproducible failure stresses which exhibited little dependence on the pillar diameter. The testing protocol lends itself to high-resolution analysis of failure surfaces, and is conducive to correlating interfacial structure and chemistry with mechanical failures within the coating/substrate interfacial region.

Type
Research Letters
Information
MRS Communications , Volume 4 , Issue 1 , March 2014 , pp. 19 - 23
Copyright
Copyright © Materials Research Society 2014 

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