Submicrometer Technique Etches Curvilinear Silicon and Glass Patterns with HF-Saturated Hydrogel Stamps

doi:10.1557/mrs2006.201

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Submicrometer Technique Etches Curvilinear Silicon and Glass Patterns with HF-Saturated Hydrogel Stamps

Published online by Cambridge University Press: 31 January 2011

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Type: Research/Researchers
Information: MRS Bulletin , Volume 31 , Issue 11: Pharmaceutical Materials Science , November 2006 , pp. 856

DOI: https://doi.org/10.1557/mrs2006.201 [Opens in a new window]
Copyright: Copyright © Materials Research Society 2006

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Submicrometer Technique Etches Curvilinear Silicon and Glass Patterns with HF-Saturated Hydrogel Stamps

Volume 31, Issue 11
DOI: https://doi.org/10.1557/mrs2006.201

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Submicrometer Technique Etches Curvilinear Silicon and Glass Patterns with HF-Saturated Hydrogel Stamps

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