Real-Time X-Ray Microbeam Technique Used to Study Electromigration in Al(Cu) Conductor Lines

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Type: Research/Researchers
Information: MRS Bulletin , Volume 26 , Issue 5: Hybrid Organic-Inorganic Materials , May 2001 , pp. 356 - 358

DOI: https://doi.org/10.1557/mrs2001.82 [Opens in a new window]

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Real-Time X-Ray Microbeam Technique Used to Study Electromigration in Al(Cu) Conductor Lines

Volume 26, Issue 5
DOI: https://doi.org/10.1557/mrs2001.82

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Real-Time X-Ray Microbeam Technique Used to Study Electromigration in Al(Cu) Conductor Lines

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