Hostname: page-component-78c5997874-dh8gc Total loading time: 0 Render date: 2024-11-02T20:05:48.288Z Has data issue: false hasContentIssue false

Pulsed Laser Deposition of High Tc Superconducting Thin Films for Electronic Device Applications

Published online by Cambridge University Press:  29 November 2013

Get access

Extract

The discovery of high transition temperature, Tc, superconductivity in copperoxide-based ceramics by Bednörz and Miiller, and the subsequent increase in Tc above the boiling point of liquid nitrogen (77 K), renewed interest in employing superconducting thin films in high-speed, low-power electronic device applications (e.g., compact high-quality factor filters, delay lines, and Josephson elements for high-speed, low-power switching). However, realization of these benefits requires well-controlled, reliable superconducting thin film technology which addresses not only the growth of superconducting thin films, but also the development of a multilayer device technology encompassing materials with metallic, semiconducting, and insulating properties.

Type
Pulsed Laser Deposition
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Bednörz, J.G. and Müller, K.A., Z. Phys. B. 64 (1986) p. 189.Google Scholar
2. Wu, M.K., Asburn, J.R., Torng, C.T., Hor, P.H., Meng, R.L., Gao, L., Huang, Z.J., Wang, Y.Q., and Chu, C.W., Phys. Rev. Lett. 58 (1987) p. 908.Google Scholar
3. Simon, R., Physics Today 44 (1991) p. 64.Google Scholar
4. Dijkkamp, D., Venkatesan, T., Wu, X.D., Shaheen, S.A., Jisrawi, N., Min-Lee, Y.H., McLean, W.L., and Croft, M., Appl. Phys. Lett. 51 (1987) p. 619.Google Scholar
5. Inam, A., Hegde, M.S., Wu, X.D., Venkatesan, T., England, P., Miceli, P.F., Chase, E.W., Chang, C.C., Tarascon, J.M., and Wachtman, J.B., Appl. Phys. Lett. 53 (1988) p. 908.Google Scholar
6. Conference Proceedings of the MRS Symposium on Laser Ablation for Materials Synthesis, edited by Paine, D.C. and Bravman, J.C. (Mater. Res. Soc. Symp. Proc. 191 Pittsburgh, PA, 1990).Google Scholar
7. Liou, S.H., Aylesworth, K.D., Ianno, N.J., Johs, B., Thompson, D., Meyer, D., Woollam, J.A., and Barry, C., Appl. Phys. Lett. 54 (1989) p. 760.Google Scholar
8. Johs, B., Thompson, D., Ianno, N.J., Woollam, J.A., Liou, S.H., Hermann, A.M., Sheng, Z.Z., Kiehl, W., Shams, Q., Fei, X., Sheng, L., and Liu, Y.H., Appl. Phys. Lett. 54 (1989) p. 1810.Google Scholar
9. Matsumoto, T., Kawai, T., Kitahama, K., Kawai, S., Shigaki, I., and Kawate, Y., Appl. Phys. Lett. 58 (1991) p. 2039.Google Scholar
10. Horwitz, J.S., Chrisey, D.B., Osofsky, M.S., Grabowski, K.S., and Vanderah, T.A., J. Appl. Phys. 70 (1991) p. 1045.Google Scholar
11. Moon, B.M., Platt, C.E., Schweinfurth, R.A., and Van Harlingen, D.J., Appl. Phys. Lett. 59 (1991) p. 1905.Google Scholar
12. Inam, A., Ramesh, R., Rogers, C.T., Wilkens, B., Remschnig, K., Hart, D., and Barner, J., IEEE Trans. Magn. 27 (2) (1991) p. 1603.Google Scholar
13. Taber, R.C., Rev. Sci. Instrum. 61 (1990) p. 2200.Google Scholar
14. Inam, A., Wu, X.D., Nazar, L., Hegde, M.S., Rogers, C.T., Venkatesan, T., Simon, R.W., Daly, K., Padamsee, H., Kirchgessner, J., Moffat, D., Rubin, D., Shu, Q.S., Kalokitis, D., Fathy, A., Pendrick, V., Brown, R., Brycki, B., Belohoubek, E., Drabeck, L., Gruner, G., Hammond, R., Gamble, F., Lairson, B.M., and Bravman, J.C., Appl. Phys. Lett. 56 (1990) p. 1178.Google Scholar
15. Ferrari, M.J., Johnson, M., Wellstood, F.C., Clarke, J., Inam, A., Wu, X.D., Nazar, L., and Venkatesan, T., Nature 341 (1989) p. 723.Google Scholar
16. Withers, R.S., Anderson, A.C., and Oates, D.E., Solid State Tech. (August 1990) p. 83.Google Scholar
17. Talvacchio, J., Wagner, G.R., and Talisa, S.H., Microwave Journal (July 1991) p. 105.Google Scholar
18. Pond, J.M., Carroll, K.R., Horwitz, J.S., Chrisey, D.B., Osofsky, M.S., and Cestone, V.C., Appl. Phys. Lett. 59 (1991) p. 3033.Google Scholar
19. Newman, H.S., Chrisey, D.B., Horwitz, J.S., Weaver, B.D., and Reeves, M.E., IEEE Trans. Magn. 27 (2) (1991) p. 2540.Google Scholar
20. Conference Proceedings of the 1990 Applied Superconductivity Conference, Snomass, CO, September 24-28, 1990.Google Scholar
21. Kalokitis, D., Fathy, A., Pendrick, V., Belohoubek, E., Findikoglu, A., Inam, A., Xi, X.X., Venkatesan, T., and Barner, J.B., Appl. Phys. Lett. 58 (1991) p. 537.Google Scholar
22. Zahopoulos, C., Sridhar, S., Bautista, J.J., Ortiz, G., and Lanagan, M., Appl. Phys. Lett. 58 (1991) p. 977.Google Scholar
23. Takemoto, J.H., Jackson, C.M., Manasevit, H.M., John, D.C. St., Burch, J.F., Daly, K.P., and Simon, R.W., Appl. Phys. Lett. 58 (1991) p. 1109.Google Scholar
24. Liang, G., Dai, X., Hebert, D.E, Van Duzer, T., Newman, N., and Cole, B.F., IEEE Trans. Appl. Supercond. 1 (1) (1991) p. 58.Google Scholar
25. Khanna, A.P.S., Schmidt, M., and Hammond, R.B., Microwave Journal (February 1991) p. 127.Google Scholar
26. Chase, E.W., Venkatesan, T., Chang, C.C., Wilkens, B., Feldman, W.L., Barboux, P., Rarascon, J.M., Hart, D.L., Wu, X.D., and Inam, X., J. Mater. Res. 4 (1989) p. 1326.Google Scholar
27. Kingston, J.J., Wellstood, F.C., Lerch, P., Miklich, A.H., and Clark, J., Appl. Phys. Lett. 56 (1990) p. 189.Google Scholar
28. Wu, X.D., Xi, X.X., Li, Q., Inam, A., Dutta, B., DiDonencia, L., Weiss, C., Martinez, J.A., Wilkens, B.J., Schwarts, A.A., Barner, J.B., Chang, C.C., Nazar, L., and Venkatesan, T., Appl. Phys. Lett. 56 (1990) p. 391.Google Scholar
29. Ramesh, R., Inam, A., Chan, W.K., Wilkens, B., Myers, K., Remschning, K., Hart, D.L., and Tarascon, J.M., Science 252 (1991) p. 994.Google Scholar
30. Horwitz, J.S., Chrisey, D.B., Grabowski, K.S., and Leuchtner, R.E., Surf, and Coat. Tech. (in press).Google Scholar
31. Claassen, J.H., Reeves, M.E., and Soulen, R.J., Rev. Sci. Instrum. 62 (4) (1991) p. 996.Google Scholar
32. Newman, H.S., Singh, A.K., Sadananda, K., and Imam, M.A., Appl. Phys. Lett. 54 (1989) p. 389.Google Scholar
33. Pond, J.M., Carroll, K.R., and Cukauskas, E.J., IEEE Trans. Magn. 27 (1991) p. 2696.Google Scholar
34. Pond, J.M., Claassen, J.H., and Carter, W.L., IEEE Trans. Magn. 23 (1987) p. 903.Google Scholar
35. Inam, A., Rogers, C.T., Ramesh, R., Remschnig, K., Farrow, L., Hart, D., Venkatesan, T., and Wilkens, B., Appl. Phys. Lett. 57 (1990) p. 2484.Google Scholar
36. Barner, J.B., Rogers, C.T., Inam, A., Ramesh, R., and Barsey, S., Appl. Phys. Lett. 59 (1991) p. 792.Google Scholar
37. Van Duzer, T. and Turner, C.W., Principles of Superconductive Devices and Circuits, (Elsevier-North Holland, New York, 1981).Google Scholar
38. Hwang, D.M., Vankatesan, T., Chang, C.C., Nazar, L., Wu, X.D., and Inam, A., Appl. Phys. Lett. 54 (1989) p. 581.Google Scholar
39. Narayanamurti, V., Science 235 (1987) p. 1023.Google Scholar
40. Matsuda, M., Kinoshita, K., Ishii, T., Shibada, H., Watanabe, T., and Yamada, T., Phys. Rev. B 38 (1988) p. 2910.Google Scholar
41. Ichinose, A., Wada, T., Yamauchi, H., and Tanaka, S., J. Ceram. Soc. Jpn. 97 (1989) p. 93.Google Scholar
42. Inam, A., Rogers, C.T., Ramesh, R., Meyers, K.E., Barner, J., Wilkens, B.J., Harshavardhan, K.S., Rajeswari, M., Bersey, S., Gertner, L., Etemad, S., Sands, T., and Tarascon, J.M., in Proc. of Int. Conf. on Modern Aspects of Super-cond., October 1991, Paris, France.Google Scholar
43. Venkatesan, T., Inam, A., Dutta, B., Ramesh, R., Hegde, M.S., Wu, X.D., Nazar, L., Chang, C.C., Barner, J., and Hwang, D.M., Appl. Phys. Lett. 56 (1990) p. 391.Google Scholar
44. Triscone, J.M., Karkut, M., Antognazza, M., Brunner, O., and Fischer, O., Phys. Rev. Lett. 63 (1989) p. 1016.Google Scholar
45. Li, Q., Xi, X.X., Wu, X.D., Inam, A., Vadlamannati, S., McLean, W.L., Venkatesan, T., Ramesh, R., Hwang, D.M., Martinez, J.A., and Nazar, J.A., Phys. Rev. Lett. 64 (1990) p. 3086.Google Scholar
46. Char, K., Cololough, M.S., Garrison, S.M., Newman, N., and Zaharchuk, G., Appl. Phys. Lett. 59 (1991) p. 733.Google Scholar