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On-Chip Testing of Mechanical Properties of MEMS Devices

Published online by Cambridge University Press:  31 January 2011

H. Kahn ,
A.H. Heuer  and
R. Ballarini
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Extract

The field of microelectromechanical systems (MEMS) involves the interaction of the physical environment with electrical signals through the use of microbatchfabricated devices. MEMS is a growing technology, and commercial MEMS products are becoming commonplace.

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 300 - 301
Copyright
Copyright © Materials Research Society 2001

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References

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