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Microsystems Technology (MST) and MEMS Applications: An Overview

Published online by Cambridge University Press:  31 January 2011

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Microelectromechanical systems (MEMS), microsystems technology (MST), and micromachines are roughly synonymous terms applied in the United States, Europe, and Japan, respectively, for manufacturing technologies that are enabling miniaturization and the development of useful products.

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Research Article
Copyright
Copyright © Materials Research Society 2001

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References

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