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Materials for stretchable electronics in bioinspired and biointegrated devices

Published online by Cambridge University Press:  12 March 2012

Dae-Hyeong Kim ,
Nanshu Lu ,
Yonggang Huang  and
John A. Rogers
Dae-Hyeong Kim
Affiliation:
Seoul National University, Institute of Chemical Processes, Korea; [email protected]
Nanshu Lu
Affiliation:
University of Texas at Austin, USA; [email protected]
Yonggang Huang
Affiliation:
Northwestern University, USA; [email protected]
John A. Rogers
Affiliation:
University of Illinois at Urbana-Champaign, USA; [email protected]
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Abstract

Inorganic semiconductors such as silicon, gallium arsenide, and gallium nitride provide, by far, the most well-established routes to high performance electronics/optoelectronics. Although these materials are intrinsically rigid and brittle, when exploited in strategic geometrical designs guided by mechanics modeling, they can be combined with elastomeric supports to yield integrated devices that offer linear elastic responses to large strain (∼100%) deformations. The result is an electronics/optoelectronics technology that offers the performance of conventional wafer-based systems, but with the mechanics of a rubberband. This article summarizes the key enabling concepts in materials, mechanics, and assembly and illustrates them through representative applications, ranging from electronic “eyeball” cameras to advanced surgical devices and “epidermal” electronic monitoring systems.

Keywords

nanostructureelectronic materialmicroelectronicsbiomedical
Type
Research Article
Information
MRS Bulletin , Volume 37 , Issue 3: Materials for stretchable electronics , March 2012 , pp. 226 - 235
Copyright
Copyright © Materials Research Society 2012

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References

1.Moore, G., Electronics 38, 114 (1965).Google Scholar
2.Vogel, E.M., Nat. Nanotechnol. 2, 25 (2007).CrossRefGoogle Scholar
3.International Technology Roadmap for Semiconductors; www.itrs.net.Google Scholar
4.Uchikoga, S., in 2006 IEEE International Symposium on Power Semiconductor Devices and IC’s (IEEE, 2006), p. 1.Google Scholar
5.Reuss, R.H., Chalamala, B.R., Moussessian, A., Kane, M.G., Kumar, A., Zhang, D.C., Rogers, J.A., Hatalis, M., Temple, D., Moddel, G., Eliasson, B.J., Estes, M.J., Kunze, J., Handy, E.S., Harmon, E.S., Salzman, D.B., Woodall, J.M., Alam, M.A., Murthy, J.Y., Jacobsen, S.C., Olivier, M., Markus, D., Campbell, P.M., Snow, E., Proc. IEEE. 93, 1239 (2005).CrossRefGoogle Scholar
6.Reuss, R.H., Hopper, D.G., Park, J.-G., MRS Bull. 31, 447 (2006).CrossRefGoogle Scholar
7.Sun, Y., Rogers, J.A., Adv. Mater. 19, 1897 (2007).CrossRefGoogle Scholar
8.Baca, A.J., Angew. Chem. Int. Ed. 47, 5524 (2008).CrossRefGoogle Scholar
9.Rogers, J.A., Someya, T., Huang, Y., Science 327, 1603 (2010).CrossRefGoogle Scholar
10.Kim, D.-H., Xiao, J.L., Song, J., Huang, Y., Rogers, J.A., Adv. Mater. 22, 2108 (2010).CrossRefGoogle Scholar
11.Rogers, J.A., Bao, Z., Baldwin, K., Dodabalapur, A., Crone, B., Raju, V.R., Kuck, V., Katz, H., Amundson, K., Ewing, J., Drzaic, P., Proc. Natl. Acad. Sci. U.S.A. 9, 4835 (2001).CrossRefGoogle Scholar
12.Rogers, J.A., Science 291, 1502 (2001).CrossRefGoogle Scholar
13.Gelinck, G.H., Huitema, H.E.A., Veenendaal, E.V., Cantatore, E., Schrijnemakers, L., van der Putten, J.B.P.H., Geuns, T.C.T., Beenhakkers, M., Giesbers, J.B., Huisman, B.-H., Meijer, E.J., Benito, E.M., Touwslager, F.J., Marsman, A.W., van Rens, B.J.E., de Leeuw, D.M., Nat. Mater. 3, 106 (2004).CrossRefGoogle Scholar
14.Huitema, H.E.A., Gelinck, G.H., van der Putten, J.B.P.H., Kuijk, K.E., Hart, C.M., Cantatore, E., Herwig, P.T., van Breemen, A.J.J.M., de Leeuw, D.M., Nature 414, 599 (2001).CrossRefGoogle Scholar
15.Ahn, J.-H., Kim, H.-S., Lee, K.J., Zhu, Z.-T., Menard, E., Nuzzo, R.G., Rogers, J.A., IEEE Electron Device Lett. 27, 460 (2006).Google Scholar
16.Kim, D.-H., Ahn, J.-H., Kim, H.-S., Lee, K.J., Kim, T.-H., Yu, C.-J., Nuzzo, R.G., Rogers, J.A., IEEE Electron Device Lett. 29, 73 (2008).CrossRefGoogle Scholar
17.Khang, D.Y., Jiang, H., Huang, Y., Rogers, J.A., Science 311, 208 (2006).CrossRefGoogle Scholar
18.Sun, Y., Choi, W.M., Jiang, H., Huang, Y., Rogers, J.A., Nat. Nanotechnol. 1, 201 (2006).CrossRefGoogle Scholar
19.Choi, W.M., Song, J., Khang, D.-Y., Jiang, H., Huang, Y.Y., Rogers, J.A., Nano Lett. 7, 1655 (2007).CrossRefGoogle Scholar
20.Kim, D.-H., Ahn, J.-H., Choi, W.M., Kim, H.-S., Kim, T.-H., Song, J., Huang, Y.Y., Liu, Z., Lu, C., Rogers, J.A., Science 320, 507 (2008).CrossRefGoogle Scholar
21.Kim, D.-H., Song, J., Choi, W.M., Kim, H.-S., Kim, R.-H., Liu, Z., Huang, Y.Y., Hwang, K.-C., Zhang, Y.-W., Rogers, J.A., Proc. Natl. Acad. Sci. U.S.A. 105, 18675 (2008).CrossRefGoogle Scholar
22.Kim, D.-H., Kim, Y.-S., Wu, J., Liu, Z., Song, J., Kim, H.-S., Huang, Y.Y., Hwang, K.-C., Rogers, J.A., Adv. Mater. 21, 3703 (2009).CrossRefGoogle Scholar
23.Park, S.-I., Xiong, Y., Kim, R.-H., Elvikis, P., Meitl, M., Kim, D.-H., Wu, J., Yoon, J., Yu, C.-J., Liu, Z., Huang, Y., Hwang, K.-C., Ferreira, P., Li, X., Choquette, K., Rogers, J.A., Science 325, 977 (2009).CrossRefGoogle Scholar
24.Kim, R.-H., Kim, D.-H., Xiao, J., Kim, B.H., Park, S.-I., Panilaitis, B., Ghaffari, R., Yao, J., Li, M., Liu, Z., Malyarchuk, V., Kim, D.G., Le, A.-P., Nuzzo, R.G., Kaplan, D.L., Omenetto, F.G., Huang, Y., Kang, Z., Rogers, J.A., Nat. Mater. 9, 929 (2010).CrossRefGoogle Scholar
25.Sekitani, T., Someya, T., Adv. Mater. 22, 2228 (2010).CrossRefGoogle Scholar
26.Bowden, N., Brittain, S., Evans, A.G., Hutchinson, J.W., Whitesides, G.M., Nature 393, 146 (1998).CrossRefGoogle Scholar
27.Lacour, S.P., Jones, J., Suo, Z., Wagner, S., IEEE Electron Device Lett. 25, 179 (2004).CrossRefGoogle Scholar
28.Lacour, S.P., Jones, J., Wagner, S., Li, T., Suo, Z., Proc. IEEE. 93, 1459 (2005).CrossRefGoogle Scholar
29.Lacour, S.P., Chan, D., Wagner, S., Li, T., Suo, Z., Appl. Phys. Lett. 88, 204103 (2006).CrossRefGoogle Scholar
30.Brosteaux, D., Axisa, F., Gonzalez, M., Vanfleteren, J., IEEE Electron Device Lett. 28, 552 (2007).CrossRefGoogle Scholar
31.Gonzalez, M., Axisa, F., Bulcke, M.V., Brosteaux, D., Vandevelde, B., Vanfleteren, J., Microelectron. Reliab. 48, 825 (2008).CrossRefGoogle Scholar
32.Huyghe, B., Rogier, H., Vanfleteren, J., Axisa, F., IEEE Trans. Adv. Packag. 31, 802 (2008).CrossRefGoogle Scholar
33.Kim, H.-J., Son, C., Ziaie, B., Appl. Phys. Lett. 92, 011904 (2008).CrossRefGoogle Scholar
34.Rim, S.-B., Catrysse, P.B., Dinyari, R., Huang, K., Peumans, P., Opt. Express 16, 4965 (2008).CrossRefGoogle Scholar
35.Dinyari, R., Rim, S.B., Huang, K., Catrysse, P.B., Peumans, P., Appl. Phys. Lett. 92, 091114 (2008).CrossRefGoogle Scholar
36.Hung, P.J., Jeong, K., Liu, G.L., Lee, L.P., Appl. Phys. Lett. 85, 6051 (2004).CrossRefGoogle Scholar
37.Lee, L.P., Szema, R., Science 310, 1148 (2005).CrossRefGoogle Scholar
38.Lacour, S.P., Tsay, C., Wagner, S., Yu, Z., Morrison, B. III, in IEEE Sensors 2005 (IEEE, 2005), p. 4.Google Scholar
39.Graudejus, O., Yu, Z., Jones, J., Morrison, B. III, Wagner, S., J. Electrochem. Soc. 156, 85 (2009).CrossRefGoogle Scholar
40.Sekitani, T., Zschieschang, U., Klauk, H., Someya, T., Nat. Mater. 9, 1015 (2010).CrossRefGoogle Scholar
41.Qi, Y., Kim, J., Nguyen, T.D., Lisko, B., Purohit, P.K., McAlpine, M.C., Nano Lett. 11, 1331 (2011).CrossRefGoogle Scholar
42.Kim, D.-H., Viventi, J., Amsden, J.J., Xiao, J., Vigeland, L., Kim, Y.-S., Blanco, J.A., Panilaitis, B., Frechette, E.S., Contreras, D., Kaplan, D.L., Omenetto, F.G., Huang, Y., Hwang, K.-C., Zakin, M.R., Litt, B., Rogers, J.A., Nat. Mater. 9, 511 (2010).CrossRefGoogle Scholar
43.Viventi, J., Kim, D.-H., Moss, J.D., Kim, Y.-S., Blanco, J.A., Annetta, N., Hicks, A., Xiao, J., Huang, Y., Callans, D.J., Rogers, J.A., Litt, B., Sci. Trans. Med. 2, 24ra22 (2010).CrossRefGoogle Scholar
44.Kim, D.-H., Lu, N., Ghaffari, R., Kim, Y.-S., Lee, S.P., Xu, L., Wu, J., Kim, R.-H., Song, J., Liu, Z., Viventi, J., de Graff, B., Elolampi, B., Mansour, M., Slepian, M.J., Hwang, S., Moss, J.D., Won, S.-M., Huang, Y., Litt, B., Rogers, J.A., Nat. Mater. 10, 316 (2011).CrossRefGoogle Scholar
45.Kim, D.-H., Lu, N., Ma, R., Kim, Y.-S., Kim, R.-H., Wang, S., Wu, J., Won, S.M., Tao, H., Islam, A., Yu, K.J., Kim, T.-I., Chowdhury, R., Ying, M., Xu, L., Li, M., Chung, H.-J., Keum, H., McCormick, M., Liu, P., Zhang, Y.-W., Omenetto, F.G., Huang, Y., Coleman, T., Rogers, J.A., Science 303, 1348 (2011).Google Scholar
46.Lipomi, D.J., Bao, Z., Energy Environ. Sci. (2011), doi:10.1039/c1ee01881g.Google Scholar
47.Cho, K.-J., Koh, J.-S., Kim, S., Chu, W.-S., Hong, Y., Ahn, S.-H., Int. J. Precis. Eng. Manuf. 10, 171 (2009).CrossRefGoogle Scholar
48.Mack, S., Meitl, M.A., Baca, A.J., Zhu, Z.-T., Rogers, J.A., Appl. Phys. Lett. 88, 213101 (2006).CrossRefGoogle Scholar
49.Baca, A.J., Meitl, M.A., Ko, H.C., Mack, S., Kim, H.-S., Dong, J., Ferreira, P.M., Rogers, J.A., Adv. Funct. Mater. 17, 3051 (2007).CrossRefGoogle Scholar
50.Ko, H.C., Baca, A.J., Rogers, J.A., Nano Lett. 6, 2318 (2006).CrossRefGoogle Scholar
51.Sun, Y., Khang, D.-Y., Hua, F., Hurley, K., Nuzzo, R.G., Rogers, J.A., Adv. Funct. Mater. 15, 30 (2005).CrossRefGoogle Scholar
52.Jiang, H., Khang, D.-Y., Song, J., Sun, Y., Huang, Y.Y., Rogers, J.A., Proc. Natl. Acad. Sci. U.S.A. 104, 15607 (2007).CrossRefGoogle Scholar
53.Song, J., Jiang, H., Choi, W.M., Khang, D.Y., Huang, Y., Rogers, J.A., J. Appl. Phys. 103, 014303 (2008).CrossRefGoogle Scholar
54.Bruel, M., Electron. Lett. 31, 1201 (1995).CrossRefGoogle Scholar
55.Sun, L., Qin, G., Seo, J.-H., Celler, G.K., Zhou, W., Ma, Z., Small 6, 2553 (2010).CrossRefGoogle Scholar
56.Qin, G., Yuan, H.-C., Celler, G.K., Ma, J., Ma, Z., Appl. Phys. Lett. 97, 233110 (2010).CrossRefGoogle Scholar
57.Schmidt, O.G., Eberl, K., Nature 410, 168 (2001).CrossRefGoogle Scholar
58.Zhang, L., Ruh, E., Grutzmacher, D., Dong, L., Bell, D.J., Nelson, B.J., Schnenberger, C., Nano Lett. 6, 1311 (2006).CrossRefGoogle Scholar
59.Ko, H., Takei, K., Kapadia, R., Chuang, S., Fang, H., Leu, P.W., Ganapathi, K., Plis, E., Kim, H.S., Chen, S.-Y., Madsen, M., Ford, A.C., Chueh, Y.-L., Krishna, S., Salahuddin, S., Javey, A., Nature 468, 286 (2010).CrossRefGoogle Scholar
60.Yuan, H.-C., Shin, J., Qin, G., Sun, L., Bhattacharya, P., Lagally, M.G., Celler, G.K., Ma, Z., Appl. Phys. Lett. 94, 013102 (2009).CrossRefGoogle Scholar
61.Yablonovitch, E., Gmitter, T., Harbison, J.P., Bhat, R., Appl. Phys. Lett. 51, 2222 (1987).CrossRefGoogle Scholar
62.Konagai, M., Sugimoto, M., Takahashi, K., J. Cryst. Growth 45, 277 (1978).CrossRefGoogle Scholar
63.Yoon, J., Jo, S., Chun, I.S., Jung, I., Kim, H.-S., Meitl, M., Menard, E., Li, X., Coleman, J.J., Paik, U., Rogers, J.A., Nature 465, 329 (2010).CrossRefGoogle Scholar
64.Chung, H.-J., Kim, T.-I., Kim, H.-S., Wells, S.A., Jo, S., Ahmed, N., Jung, Y.H., Won, S.M., Bower, C.A., Rogers, J.A., Adv. Funct. Mater. 21, 3029 (2011).CrossRefGoogle Scholar
65.Meitl, M.A., Zhu, Z.-T., Kumar, V., Lee, K.J., Feng, X., Huang, Y.Y., Adesida, I., Nuzzo, R.G., Rogers, J.A., Nat. Mater. 5, 33 (2006).CrossRefGoogle Scholar
66.Feng, X., Meitl, M.A., Bowen, A.M., Huang, Y., Nuzzo, R.G., Rogers, J.A., Langmuir 23, 12555 (2007).CrossRefGoogle Scholar
67.Kim, T.-H., Carlson, A., Ahn, J.-H., Won, S.M., Wang, S., Huang, Y., Rogers, J.A., Appl. Phys. Lett. 94, 113502 (2009).CrossRefGoogle Scholar
68.Kim, S., Wu, J., Carlson, A., Jin, S.H., Kovalsky, A., Glass, P., Liu, Z., Ahmed, N., Elgan, S.L., Chen, W., Ferreira, P.M., Sitti, M., Huang, Y., Rogers, J.A., Proc. Natl. Acad. Sci. U.S.A. 107, 17095 (2010).CrossRefGoogle Scholar
69.Kang, S.J., Kocabas, C., Kim, H.-S., Cao, Q., Meitl, M.A., Khang, D.-Y., Rogers, J.A., Nano Lett. 7, 3343 (2007).CrossRefGoogle Scholar
70.Unarunotai, S., Koepke, J.C., Tsai, C.-L., Du, F., Chialvo, C.E., Murata, Y., Haasch, R., Petrov, I., Mason, N., Shim, M., Lyding, J., Rogers, J.A., ACS Nano 4, 5591 (2010).CrossRefGoogle Scholar
71.Ko, H.C., Stoykovich, M.P., Song, J., Malyarchuk, V., Choi, W.M., Yu, C.-J., Geddes, J. III, Xiao, J., Wang, S., Huang, Y.Y., Rogers, J.A., Nature 454, 748 (2008).CrossRefGoogle Scholar
72.Ko, H.C., Shin, G., Wang, S., Stoykovich, M.P., Lee, J.W., Kim, D.-H., Ha, J.S., Huang, Y., Hwang, K.-C., Rogers, J.A., Small 5, 2703 (2009).CrossRefGoogle Scholar
73.Song, J., Huang, Y., Xiao, J.L., Wang, S.D., Hwang, K.-C., Ko, H.C., Kim, D.-H., Stoykovich, M.P., Rogers, J.A., J. Appl. Phys. 105, 123516 (2009).CrossRefGoogle Scholar
74.Lee, J., Wu, J., Shi, M., Yoon, J., Park, S.-I., Li, M., Liu, Z., Huang, Y., Rogers, J.A., Adv. Mater. 23, 986 (2011).CrossRefGoogle Scholar
75.Kim, R.-H., Bae, M.-H., Kim, D.G., Cheng, H., Kim, B.H., Kim, D.-H., Li, M., Wu, J., Kim, H.-S., Hong, S.W., Huang, Y., Pop, E., Rogers, J.A., Nano Lett. (2011), doi: 10.1021/n1202000u.Google Scholar
76.Gray, D.S., Tien, J., Chen, C.S., Adv. Mater. 16, 393 (2004).CrossRefGoogle Scholar
77.Kim, D.-H., Liu, Z., Kim, Y.-S., Wu, J., Song, J., Kim, H.-S., Huang, Y., Hwang, K.-C., Zhang, Y., Rogers, J.A., Small 5, 2841 (2009).CrossRefGoogle ScholarPubMed
78.Wu, J., Liu, Z.J., Song, J.Z., Huang, Y., Hwang, K.-C., Zhang, Y.W., Rogers, J.A., Appl. Phys. Lett. 99, 061911 (2011).CrossRefGoogle Scholar
79.Shin, G., Jung, I., Malyarchuk, V., Song, J., Wang, S., Ko, H.C., Huang, Y., Ha, J.S., Rogers, J.A., Small 6, 851 (2010).CrossRefGoogle Scholar
80.Jung, I., Shin, G., Malyarchuk, V., Ha, J.S., Rogers, J.A., Appl. Phys. Lett. 96, 021110 (2010).CrossRefGoogle Scholar
81.Jung, I., Xiao, J., Malyarchuk, V., Lu, C., Li, M., Liu, Z., Yoon, J., Huang, Y., Rogers, J.A., Proc. Natl. Acad. Sci. U.S.A. 108, 1788 (2011).CrossRefGoogle Scholar
82.Malyarchuk, V., Jung, I., Rogers, J.A., Shin, G., Ha, J.S., Opt. Express 18, 27346 (2010).CrossRefGoogle Scholar
83.Huang, K., Peumans, P., Proc. SPIE 6174, 617412 (2006).CrossRefGoogle Scholar
84.Campbell, P.K., Jones, K.E., Huber, R.J., Horch, K.W., Normann, R.A., IEEE Trans. Biomed. Eng. 38, 758 (1991).CrossRefGoogle Scholar
85.Ives, J.R., Mirsattari, S.M., Jones, D., Clin. Neurophysiol. 118, 1633 (2007).CrossRefGoogle Scholar
86.Goldman, R., Stern, J.M., Engel, J. Jr., Cohen, M.S., Neuroreport 13, 2487 (2002).CrossRefGoogle Scholar
87.Leonov, V., Torfs, T., Vullers, R.J.M., Hoof, C.V., J. Electron. Mater. 39, 1674 (2010).Google Scholar
88.Pryce, I.M., Aydin, K., Kelaita, Y.A., Briggs, R.M., Atwater, H.A., Nano Lett. 10, 4222 (2010).CrossRefGoogle Scholar
89.Feng, X., Yang, B.D., Liu, Y., Wang, Y., Dagdeviren, C., Liu, Z., Carlson, A., Li, J., Huang, Y., Rogers, J.A., ACS Nano 5, 3326 (2011).CrossRefGoogle Scholar