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Information: MRS Bulletin , Volume 30 , Issue 12: Fabrication of Sub-45-nm Device Structures , December 2005 , pp. 994 - 997

DOI: https://doi.org/10.1557/mrs2005.264 [Opens in a new window]

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Volume 30, Issue 12
DOI: https://doi.org/10.1557/mrs2005.264

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