Gradient Chemical Micropatterning Enables Fabrication of Reference Substrates for Calibration of Scanning Surface Nanometrology

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Type: Research/Researchers
Information: MRS Bulletin , Volume 30 , Issue 10: Self-Assembly in Materials Synthesis , October 2005 , pp. 686 - 687

DOI: https://doi.org/10.1557/mrs2005.212 [Opens in a new window]

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Gradient Chemical Micropatterning Enables Fabrication of Reference Substrates for Calibration of Scanning Surface Nanometrology

Volume 30, Issue 10
Fengting Xu
DOI: https://doi.org/10.1557/mrs2005.212

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Gradient Chemical Micropatterning Enables Fabrication of Reference Substrates for Calibration of Scanning Surface Nanometrology

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