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Fundamentals of Secondary Ion Mass Spectrometry

Published online by Cambridge University Press:  29 November 2013

W. Katz  and
J.G. Newman
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Abstract

This article presents an overview of our current understanding of the fundamental factors underlying Secondary Ion Mass Spectrometry (SIMS). Included is a discussion of the sputtering process and possible mechanisms which produce ejected ions. Presently available instrumentation for SIMS analysis is discussed and some examples of SIMS analysis are also given.

Type
Materials Microanalysis
Information
MRS Bulletin , Volume 12 , Issue 6 , September 1987 , pp. 40 - 47
Copyright
Copyright © Materials Research Society 1987

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References

1.Williams, P., Appl. Surf. Sci. 1 (1982), p. 3, 241.CrossRefGoogle Scholar
2.Winters, H.F., Radiat. Eff. 64 (1982) p. 79.CrossRefGoogle Scholar
3.Hart, R.G. and Cooper, C.B., Surf. Sci. 94 (1980) p. 105.CrossRefGoogle Scholar
4.Harrison, D.E. Jr., Kelly, P.W., Garrison, B.J., and Winograd, N., Surf. Sci. 76 (1978) p. 311.CrossRefGoogle Scholar
5.Winograd, N., Garrison, B.J., and Harrison, D.E. Jr., Phys. Rev. Lett. 41 (1978) p. 1120.CrossRefGoogle Scholar
6.Harrison, D.E. Jr., Moore, W.L., and Holcombe, H.T., Radiat. Eff. 17 (1973) p. 167.CrossRefGoogle Scholar
7.Hofer, W.O., Radiat. Eff. 19 (1973) p. 263.CrossRefGoogle Scholar
8.Woodyard, J.R. and Cooper, C.B., J. Appl. Phys. 35 (1964) p. 1107.CrossRefGoogle Scholar
9.Joyes, P., J. of Phys. B: Atomic Molec. Phys. 4 (1971) p. L15.CrossRefGoogle Scholar
10.Slodzian, G., Surf. Sci. 48 (1975) p. 161.CrossRefGoogle Scholar
11.Andersen, C.A., Int. J. Mass. Spec. Ion Phys. 3 (1970) p. 413.CrossRefGoogle Scholar
12.der Weg, W.F. Van and Bierman, D.J., Physica 44 (1969) p. 206.CrossRefGoogle Scholar
13.Thomas, G.E., Radiat. Eff. 31 (1977) p. 185.CrossRefGoogle Scholar
14.Williams, P. and Evans, C.A. Jr., Surf. Sci. 78 (1978) p. 324.CrossRefGoogle Scholar
15.Storms, H.A., Brown, K.F., and Stein, J.D., Anal. Chem. 49 (1977) p. 2023.CrossRefGoogle Scholar
16.Deline, V.R., Katz, W., Evans, C.A. Jr., and Williams, P., Appl. Phys. Lett. 33 (1978) p. 832.CrossRefGoogle Scholar
17.Williams, P., Lewis, R.K., Evans, C.A. Jr., and Hanley, P.R., Anal. Chem. 49 (1977) p. 1399.CrossRefGoogle Scholar
18.Storms, H.A., Brown, K.F., and Stein, J.D., Anal. Chem. 49 (1977) p. 2023.CrossRefGoogle Scholar
19.Valyi, L., Atom and Ion Sources (John Wiley and Sons, London, 1977) p. 138, and references therein.Google Scholar
20.Prewett, P.D., Jefferies, D.K., and McMillan, D.J., Vacuum 34 (1984) p. 107.CrossRefGoogle Scholar
21.Waugh, A.R., Bayly, A.R., and Anderson, K., Vacuum 34 (1984) p. 103.CrossRefGoogle Scholar
22.White, F.A. and Wood, G.M., Mass Spectrometry (John Wiley and Sons, New York, 1986) p. 51.Google ScholarPubMed
23. References found in Secondary Ion Mass Spectrometry SIMS II-V, edited by Benninghoven, A. (Springer-Verlag, New York, 1979–1985).CrossRefGoogle Scholar
24.Phillips, B.F., Burkman, D.C., Schmidt, W.R., and Peterson, C.A., J. Vac. Sci. Technol. A, 1 (1983) p. 646.CrossRefGoogle Scholar
25.Barocela, E., J. Vac. Sci. Technol. A, 4 (1986) p. 1893.CrossRefGoogle Scholar
26.Andersen, C.A., Hinthorne, J.R., and Fredrickson, K., Proceedings of the Apollo 11 Lunar Sci. Conf. 1 (1970) p. 159.Google Scholar
27.Valenty, S.J., Chera, J.J., Olson, D.R., Webb, K.K., Smith, G.A., and Katz, W., J. Am. Chem. Soc. 106 (1984) p. 6155.CrossRefGoogle Scholar
28.Burns, M.S., Proceeding of the Fifth International SIMS Conference 44 (1985) p. 426.Google Scholar