Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-27T21:25:00.355Z Has data issue: false hasContentIssue false
  • English
  • Français

Fabrication of Porous Metal Bonded Diamond Grinding Wheels for Flat-Surface Nanomachining

Published online by Cambridge University Press:  31 January 2011

Koji Matsumaru  and
Atsushi Takata
Get access

Extract

The articles thus far in this MRS Bulletin issue on Emerging Methods for Micro- and Nanofabrication have addressed the creation of structures or devices on a small scale. What is implicit in some of these articles is that a substrate of sufficient flatness is available upon which to build these structures in a controlled way. A related area, therefore, is the formation of these flat surfaces, as well as the development of the tools to make them.

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 7: Emerging Methods for Micro- and Nano-Fabrication Nanofabrication , July 2001 , pp. 544 - 546
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Kobayashi, A., Ultraprecision Manufacturing Technology, Vol. 1 (Fuji Technosystem, Tokyo, Japan, 1995).Google Scholar
2.Ishizaki, K., Komarneni, S., and Nanko, M., Materials Technology Series Vol. 4: Porous Materials (Kluwer Academic Publishers, Boston, 1998) p. 189.Google Scholar
3.Ishizaki, K., Yamamoto, S., Takata, A., and Kondo, Y., U.S. Patent No. 5,637,123 (June 10, 1997).Google Scholar
4.Onishi, H., Kondo, Y., Yamamoto, S., Tsukuda, A., and Ishizaki, K., J. Ceram. Soc. Jpn. 104 (1996) p. 610.CrossRefGoogle Scholar
5.Ishizaki, K. and Takata, A., Japanese Patent Pending (1998).Google Scholar
6.Ichida, Y., Kishi, K., Hasuda, Y., and Akbari, J., J. Jpn. Soc. Prec. Eng. 57 (8) (1991) p. 1406.CrossRefGoogle Scholar
7.Ichida, Y., Kishi, K., and Hasuda, Y., in Proc. 28th Jpn. Cong. Materials Research (Japan Society for Precision Engineering, 1985) p. 183.Google Scholar
8.Kawabata, N. and Takeuchi, K., Kikai to Kogu 6 (1988) p. 73.Google Scholar
9.Ichida, Y., in “Precision Machining of Fine Ceramics” (in Japanese), Chapter 7.2, edited by the Kenkyu-kai, Seramikkusu Kako (Kogyo Chosakai, Japan, 1990) p. 136.Google Scholar
10.Tomimori, H., Fine Ceram. Report 1 (8) (1983) p.5.Google Scholar
11.Ichida, Y., Kishi, K., and Hasuda, Y., J. Jpn. Soc. Prec. Eng. 58 (6) (1992) p. 1065.CrossRefGoogle Scholar