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Epitaxial PZT films for MEMS printing applications

Published online by Cambridge University Press:  12 November 2012

Hiroshi Funakubo ,
Matthijn Dekkers ,
Alessia Sambri ,
Stefano Gariglio ,
Igor Shklyarevskiy  and
Guus Rijnders
Hiroshi Funakubo
Affiliation:
Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology; [email protected]
Matthijn Dekkers
Affiliation:
SolMateS, The Netherlands
Alessia Sambri
Affiliation:
University of Naples Federico II, Italy; [email protected]
Stefano Gariglio
Affiliation:
Condensed Matter Physics Department, University of Geneva; [email protected]
Igor Shklyarevskiy
Affiliation:
Oce-Technologies B.V., The Netherlands
Guus Rijnders
Affiliation:
University of Twente, The Netherlands; [email protected]
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Abstract

Films of piezoelectric and ferroelectric oxides have been widely investigated for various applications, including microelectromechanical systems (MEMS) for printing. Pb(Zr,Ti)O3 is of particular interest due to its excellent piezoelectric properties. Control of the density, crystalline orientation, and compositional uniformity is essential to obtain these properties. In this article, we review recent progress on the fabrication of epitaxial Pb(Zr,Ti)O3films, in which the aforementioned control can be achieved. We discuss the different approaches used for the deposition of the epitaxial piezoelectric layer as well as the achieved degrees of the epitaxy. Furthermore, the integration of these piezoelectric layers in MEMS and the corresponding performance are discussed.

Keywords

Microstructurecrystallinethin filmpiezoelectricepitaxy
Type
Research Article
Information
MRS Bulletin , Volume 37 , Issue 11: Thin-film piezoelectric MEMS , November 2012 , pp. 1030 - 1038
Copyright
Copyright © Materials Research Society 2012

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