Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-27T20:51:32.823Z Has data issue: false hasContentIssue false
  • English
  • Français

Diffusional Creep: Stresses and Strain Rates in Thin Films and Multilayers

Published online by Cambridge University Press:  31 January 2011

D. Josell ,
T. P. Weihs  and
H. Gao
Get access

Abstract

In this article, we discuss creep deformation as it relates to thin films and multilayer foils. We begin by reviewing experimental techniques for studying creep deformation in thin-film geometries, listing the pros and cons of each; then we discuss the use of deformation-mechanism maps for recording and understanding observed creep behavior. We include a number of cautionary remarks regarding the impact of microstructural stability, zero-creep stresses, and transient-creep strains on stress–strain rate relationships, and we finish by reviewing the current state of knowledge for creep deformation in thin films. This includes both thin films that are heated on substrates as well as multilayer films that are tested as freestanding foils.

Keywords

diffusional creepmechanical propertiesthin films.
Type
Research Article
Information
MRS Bulletin , Volume 27 , Issue 1: Mechanical Properties in Small Dimensions , January 2002 , pp. 39 - 44
Copyright
Copyright © Materials Research Society 2002

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Schiøtz, J., Vegge, T., Di Tolla, F.D., and Jacobsen, K.W., Phys. Rev. B 60 (1999) p. 11971.CrossRefGoogle Scholar
2.Sharpe, W.N., Yuan, B., and Edwards, R.L., J. Microelectromech. Sys. 6 (1997) p. 193.CrossRefGoogle Scholar
3.Kraft, O. and Volkert, C.A., Adv. Eng. Mater. 3 (2001) p. 99.3.0.CO;2-2>CrossRefGoogle Scholar
4.Weihs, T.P., Hong, S., Bravman, J.C., and Nix, W.D., J. Mater. Res. 3 (1988) p. 931.CrossRefGoogle Scholar
5.Nix, W.D., Metall. Trans. A 20A (1989) p. 2217.CrossRefGoogle Scholar
6.Hommel, M., Kraft, O., and Arzt, E., J. Mater. Res. 14 (1999) p. 2373.CrossRefGoogle Scholar
7.Atkins, A.G., Silverio, A., and Tabor, D., J. Inst. Met. 94 (1966) p. 369.Google Scholar
8.Chu, S.N.G. and Li, J.C.M., J. Mater. Sci. 12 (1977) p. 2200.CrossRefGoogle Scholar
9.Stone, D., Lafontaine, W.R., Alexopoulos, P., and Li, C.Y., J. Mater. Res. 3 (1988) p. 141.CrossRefGoogle Scholar
10.Raman, V. and Berriche, R., J. Mater. Res. 7 (1992) p. 627.CrossRefGoogle Scholar
11.Thouless, M.D., Acta Metall. Mater. 41 (1993) p. 1057.CrossRefGoogle Scholar
12.Miller, K.T., Lange, F.F., and Marshall, D.B., J. Mater. Res. 5 (1990) p. 151.CrossRefGoogle Scholar
13.Genin, F.Y., Mullins, W.W., and Wynblatt, P., Acta Metall. Mater. 40 (1992) p. 3239.CrossRefGoogle Scholar
14.Srolovitz, D.J. and Safran, S.A., J. Appl. Phys. 60 (1986) p. 247.CrossRefGoogle Scholar
15.Srolovitz, D.J. and Safran, S.A., J. Appl. Phys. 60 (1986) p. 255.CrossRefGoogle Scholar
16.Josell, D. and Carter, W.C., in Creep and Stress Relaxation in Miniature Structures and Components, edited by Merchant, H.D. (The Minerals, Metals, and Materials Society, Warrendale, PA, 1996) p. 271.Google Scholar
17.Josell, D., Coriell, S.R., and Mc Fadden, G.B., Acta Metall. Mater. 43 (1995) p. 1987.CrossRefGoogle Scholar
18.Fain, J.P., Banerjee, R., Josell, D., Anderson, P.M., Fraser, H., Tymiak, N., and Gerberich, W., in Nanophase and Nanocomposite Materials III, edited by Komarneni, S., Parker, J.C., and Hahn, H. (Mater. Res. Soc. Symp. Proc. 581, Warrendale, PA, 2000) p. 603.Google Scholar
19.Josell, D., Carter, W.C., and Bonevich, J.E., Nanostruct. Mater. 12 (1999) p. 387.CrossRefGoogle Scholar
20.Lewis, A.C., Mann, A.B., Josell, D., Tapson, J., and Weihs, T.P., in Interfacial Engineering for Optimized Properties II, edited by Carter, C.B., Hall, E.L., Nutt, S.R., and Briant, C.L. (Mater. Res. Soc. Symp. Proc. 586, Warrendale, PA, 2000) p. 249.Google Scholar
21.Courtney, T.H., Mechanical Behavior of Materials (McGraw-Hill, New York, 2000).Google Scholar
22.Gibbs, G.B., Philos. Mag. 13 (1966) p. 589.CrossRefGoogle Scholar
23.Frost, H.J. and Ashby, M.F., Deformation-Mechanism Maps: The Plasticity and Creep of Metals and Ceramics (Pergamon Press, New York, 1982).Google Scholar
24.Josell, D. and Spaepen, F., Acta Metall. Mater. 41 (1993) p. 3007.CrossRefGoogle Scholar
25.Josell, D. and Spaepen, F., Acta Metall. Mater. 41 (1993) p. 3017.CrossRefGoogle Scholar
26.Josell, D. and Wang, Z.L., in Thin Films: Stresses and Mechanical Properties V, edited by Baker, S.P., Ross, C.A., Townsend, P.H., Volkert, C.A., and Børgesen, P. (Mater. Res. Soc. Symp. Proc. 356, Pittsburgh, 1995) p. 357.Google Scholar
27.Harris, K.E. and King, A.H., Acta Mater. 46 (1998) p. 6195.CrossRefGoogle Scholar
28.Lewis, A.C., Mann, A.B., van Heerden, D., Josell, D., and Weihs, T.P., in Influences of Interface and Dislocation Behavior on Microstructure Evolution, edited by Aindow, M., Asta, M.D., Glazov, M.V., Medlin, D.L., Rollet, A.D., and Zaiser, M. (Mater. Res. Soc. Symp. Proc. 652, Warrendale, PA, 2001) p. Y1.3.1.Google Scholar
29.Shang, C.H., Cammarata, R.C., Chien, C.L., and Weihs, T.P., Acta. Mater. (2001) to be submitted.Google Scholar
30.Sherby, O.D. and Burke, P.M., Prog. Mater. Sci. 13 (1968) p. 325.CrossRefGoogle Scholar
31.Brotzen, F.R., Rosenmayer, C.T., Cofer, C.G., and Gale, R.J., Vacuum 41 (1990) p. 1287.CrossRefGoogle Scholar
32.Thouless, M.D., Gupta, J., and Harper, J.M.E., J. Mater. Res. 8 (1993) p. 1845.CrossRefGoogle Scholar
33.Keller, R.-M., Baker, S.P., and Arzt, E., Acta Mater. 47 (1999) p. 415.CrossRefGoogle Scholar
34.Arzt, E., Dehm, G., Gumbsch, P., Kraft, O., and Weiss, D., Prog. Mater. Sci. 46 (2001) p. 283.CrossRefGoogle Scholar
35.Weiss, D., Gao, H., and Arzt, E., Acta Mater. 49 (2001) p. 2395.CrossRefGoogle Scholar
36.Gao, H., Zhang, L., Nix, W.D., Thompson, C.V., and Arzt, E., Acta Mater. 47 (1999) p. 2865.CrossRefGoogle Scholar
37.Shen, Y.-L. and Suresh, S., Acta Metall. Mater. 43 (1995) p. 3915.CrossRefGoogle Scholar
38.Shen, Y.-L. and Suresh, S., J. Mater. Res. 10 (1995) p. 1200.CrossRefGoogle Scholar
39.Shen, Y.-L. and Suresh, S., Acta Mater. 44 (1996) p. 1337.CrossRefGoogle Scholar
40.Pelosin, V. and Hillairet, J., Nanostruct. Mater. 4 (1994) p. 229.CrossRefGoogle Scholar
41.Pelosin, V., Hillairet, J., and Rodmacq, B., J. Phys.: Condens. Matter 6 (1994) p. 1099. Strain rate obtained from creep data in Figure 8.Google Scholar