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Diamond Films: Recent Developments in Theory and Practice

Published online by Cambridge University Press:  29 November 2013

A.M. Stoneham ,
I.J. Ford  and
P.R. Chalker
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The diamond films of the early 1980s presented two quite different challenges. First how could this new form of diamond be exploited technically? Second, how could this clearly nonequilibrium generation of diamond be understood and the understanding be used to maximum effect? We shall be discussing the ideas of theory and modeling, and we will show how they have contributed to the interplay of science and technology.

The science of diamond films is the art of beating nature in the use of carbon. Theory gives the understanding to improve this art. One way in which we improve on nature is in new geometries: controlled growth over selected surfaces o surface regions. The coverage, defect density, microstructure, and rate of growth are key issues. Another way to beat nature is controlled doping. Could wmake n-type semiconductors or lasers using diamond films? A third direction might be routes to control interfaces. Grai boundaries and the regions between small, misaligned crystals affect thermal properties and electron emission. Difficulties with electrical contacts may limit the use of diamond films as semiconductors or insulators. Substrate-film adhesion can determine tribological performance.

If theory is to play a role in controlling film deposition, we need to understand the role of theory itself. Theory can add value at several distinct levels. At the highest level, modeling has the potential to provide a substitute for experiment, especially when information is needed about behavior at extreme conditions. When the phenomena are very fast or very complex, theory can be used to interpret limited experiments. At a more modest level, even simple quantitative models can illustrate the many processes occurring during film growth. Atomistic theories of this type can identify the rate-determining steps and point to ways of influencing them. Mesoscopic theories, especially combined with macroscopic approaches like elasticity theory, can identify routes to improved performance.

Type
Diamond Films: Recent Developments
Information
MRS Bulletin , Volume 23 , Issue 9 , September 1998 , pp. 28 - 31
Copyright
Copyright © Materials Research Society 1998

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References

1. For example, see Stoneham, A.M. in The Properties of Natural and Synthetic Diamond edited by Field, J.E. (Academic Press, London, 1992) p. 3 for broad review of diamond theory.Google Scholar
2.Wang, Z.Q., Stroud, D., and Dregia, S.A., Phys. Rev. B 50 (1994) p. 12073.CrossRefGoogle Scholar
3.Hartmann, J., Costello, M., and Reichling, M., Phys. Rev. Lett. 80 (1998) p. 117.CrossRefGoogle Scholar
4.Bachmann, P.K. and Messier, R., Chem. Eng News 67 (1989) p. 24.CrossRefGoogle Scholar
5.Joeris, P., Benndorf, C., and Kroeger, R., Surf. Coat. Technol. 59 (1993) p. 310.CrossRefGoogle Scholar
6.Chen, C.F., Lin, C.L., and Hong, T.M., Surf. Coat. Technol. 52 (1992) p. 205; C.E. Johnson and W.A. Weimer, J. Mater. Res. 8 (1993) p. 2245.CrossRefGoogle Scholar
7.Hukka, T.I., Rawles, R.E., and D'Evelyn, M.P., in Chemical Perspectives of Microelectronic Materials III, edited by Abernathy, C.R., Bates, C.W., Bohling, D.A., and Hobson, W.S. (Mater. Res. Soc. Symp. 282, Pittsburgh, 1993) p. 671.Google Scholar
8.Thomas, L., Cinelli, M.J., Jauberteau, J.L., Aubreton, J., and Catherinot, A., Diamond Rel. Mater. 3 (1994) p. 560.CrossRefGoogle Scholar
9.Bachmann, P.K., Leers, D., and Lydtin, H., Diamond Rel. Mater. 1 (1991) p. 1.CrossRefGoogle Scholar
10.Kee, R.J., Rupley, F.M., and Miller, J.A., The CHEMKIN Thermodynamic Database, Sandia Report No. 87-8215 UC-4 (Sandia National Laboratories, Livermore, CA, 1987).Google Scholar
11.Beckmann, R., Sobisch, B., and Kulisch, W., Diamond Rel. Mater. 4 (1995) p. 256.CrossRefGoogle Scholar
12.Wild, C., Kohl, R., Herres, N., Müller-Sebert, W., and Koidl, P., Diamond Rel. Mater. 3 (1994) p. 373.CrossRefGoogle Scholar
13.Ford, I.J., J. Appl. Phys. 78 (1995) p. 510; J. Phys. D 29 (1996) p. 2229.CrossRefGoogle Scholar
14.Battaile, C., Srolovitz, D.J., and Butler, J.E., Diamond Rel. Mater. 6 (1997) p. 1198.CrossRefGoogle Scholar
15.Matsumoto, S., Sato, Y., Tsumi, M.T., and Setaka, N., J. Mater. Sci. 17 (1982) p. 3106.CrossRefGoogle Scholar
16.Yugo, S., Kanai, T., Kimura, T., and Muto, T., Appl. Phys. Lett. 58 (1991) p. 1036.CrossRefGoogle Scholar
17.McGinnis, S.P., Kelly, M.A., and Hagström, S.B., J. Mater. Res. 12 (1997) p. 3354.CrossRefGoogle Scholar
18.Uhlmann, S., Frauenheim, T., and Stephan, U., Phys. Rev. B 51 (1995) p. 4541.CrossRefGoogle Scholar
19.Mahalingam, P., Liu, H., and Dandy, D.S., J. Appl. Phys. 81 (1997) p. 1966.CrossRefGoogle Scholar
20.Hayashi, K., Yamanaka, S., Watanabe, H., Sekiguchi, T., Okushi, H., and Kajimura, K., J. Appl. Phys. 81 p. 7078.CrossRefGoogle Scholar
21.Stoneham, A.M., Ramos, M.M.D., and Sutton, A.P., Philos. Mag. A67 (1993) p. 797.CrossRefGoogle Scholar
22.Harrison, J.A., White, C.T., Colton, R.J., and Brenner, D.W., Thin Solid Films 260 (1995) p. 205.CrossRefGoogle Scholar
23.Stoneham, A.M. and Harker, A.H., Wear 80 (1982) p. 377.CrossRefGoogle Scholar
24.Huang, Z-H., Cutler, P.H., Miskovsky, N.M., and Sullivan, T.E., Appl. Phys. Lett. 65 (1994) p. 2652.Google Scholar
25.Miskovsky, N.M., Cutler, P.H., and Huang, Z-H., J. Vac. Sci. Technol. B 14 (1996) p. 2037.CrossRefGoogle Scholar