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Diamond and Amorphous Carbon MEMS

Published online by Cambridge University Press:  31 January 2011

J.P. Sullivan ,
T.A. Friedmann  and
K. Hjort
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Extract

The designer of microelectromechanical systems (MEMS) can increase MEMS performance either by improved mechanical design or by the selection of a MEMS material with improved mechanical performance. In the quest to identify highperformance MEMS materials, diamond and amorphous carbon have recently emerged as a promising class of materials.

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 309 - 311
Copyright
Copyright © Materials Research Society 2001

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