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Chip-to-Module Interconnections Using “Sea of Leads” Technology

Published online by Cambridge University Press:  31 January 2011

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Abstract

The drive toward higher density and higher performance in integrated circuits creates a need to keep interconnects short and eliminate layers of packaging. In this article, we propose a novel, ultrahigh-density (exceeding 104 leads per cm2), compliant, wafer-level, input/output interconnection technology called “sea of leads” as a key enabling technology for future high-performance microsystems. The mechanical compliance is addressed through slippery leads (leads released from the surface) and embedded air gaps. The ability to fabricate embedded air gaps has enabled the integration of optical interconnects with high index-of-refraction mismatches between the core and cladding.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

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References

1.Meindl, J.D., Davis, J.A., Zarkesh-Ha, P., Patel, C.S., Martin, K.P., and Kohl, P.A., IBM J. Res. Dev. 46 (2002) p. 245.CrossRefGoogle Scholar
2.Meindl, J.D., Venkatesan, R., Davis, J.A., Joyner, J., Naeemi, A., Zarkesh-Ha, P., Bakir, M.S., Mulé, A.V., Kohl, P.A., and Martin, K.P., in IEEE Int. Electron Devices Meet. Tech. Dig. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2001) p. 525.Google Scholar
3.2001 International Technology Roadmap for Semiconductors (ITRS) (Semiconductor Industry Association, San Jose, 2001).Google Scholar
4.Bakir, M.S., Reed, H.A., Kohl, P.A., Martin, K.P., and Meindl, J.D., in Proc. IEEE Electronic Components and Technology Conf. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2002) p. 1087.Google Scholar
5.Bakir, M.S., Reed, H.A., Mulé, A.V., Kohl, P.A., Martin, K.P., and Meindl, J.D., in Proc. Custom Integrated Circuits Conf. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2002) p. 491.Google Scholar
6.Patel, C.S., “Compliant Wafer-Level Package (CWLP),” PhD dissertation, Georgia Institute of Technology, 2001.CrossRefGoogle Scholar
7.Patel, C.S., Power, C., Realff, M., Kohl, P.A., Martin, K.P., and Meindl, J.D., in Proc. Int. Conf. on High-Density Interconnect and Systems Packaging (International Microelectronics and Packaging Society, Washington, DC, and CMP Media, Manhasset, NY, 2000) p. 335.Google Scholar
8.Thacker, H.D., Bakir, M.S., Keezer, D., Martin, K.P., and Meindl, J.D., in Proc. IEEE Electronic Components and Technology Conf. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2002) p. 1188.Google Scholar
9.Reed, H.A., White, C.E., Rao, V., Allen, S.A., Henderson, C.L., and Kohl, P.A., J. Micromech. Microeng. 11 (2001) p. 733.CrossRefGoogle Scholar
10.Wu, X., Reed, H.A., Rhodes, L.F., Elce, E., Ravikiran, R., Shick, R.A., Henderson, C.L., Bidstrup Allen, S.A., and Kohl, P.A., J. Electrochem. Soc. 149 (10) (2002) p. S79.Google Scholar
11.Wu, X., Reed, H.A., Rhodes, L.F., Elce, E., Ravikiran, R., Shick, R.A., Henderson, C.L., Allen, S.A., and Kohl, P.A., J. Appl. Polym. Sci. in press.Google Scholar
12.Schultz, S.M., Glytsis, E.N., and Gaylord, T.K., Opt. Lett. 24 (1999) p. 1708.CrossRefGoogle Scholar
13.Jones, M., PhD thesis, Georgia Institute of Technology, 1995.Google Scholar
14.Villalaz, R., Glytsis, E.N., and Gaylord, T.K., Appl. Opt. 41 (2002) p. 5223.CrossRefGoogle Scholar
15.Mulé, A.V., Bakir, M., Jayachandran, J.P., Villalaz, R., Reed, H., Martin, K., Kohl, P., Glytsis, E., Gaylord, T., Meindl, J., Agrawal, N., Ponoth, S., Plawsky, J., and Persans, P., in Proc. IEEE Int. Interconnect Tech. Conf. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2002) p. 122.Google Scholar
16.Jain, A., Rogojevic, S., Ponoth, S., Agarwal, N., Matthew, I., Gill, W.N., Persans, P., Tomozawa, M., Plawsky, J.L., and Simonyi, E., Thin Solid Films 513 (2001) p. 398.Google Scholar