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Atom-by-atom fabrication by electron beam via induced phase transformations

Published online by Cambridge University Press:  08 September 2017

Nan Jiang ,
Eva Zarkadoula ,
Prineha Narang ,
Artem Maksov ,
Ivan Kravchenko ,
Albina Borisevich ,
Stephen Jesse  and
Sergei V. Kalinin
Nan Jiang
Affiliation:
Department of Physics, Arizona State University, USA; [email protected]
Eva Zarkadoula
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, USA; [email protected]
Prineha Narang
Affiliation:
John A. Paulson School of Engineering and Applied Sciences, Harvard University, USA; [email protected]
Artem Maksov
Affiliation:
Bredesen Center for Interdisciplinary Research and Graduate Education, University of Tennessee, Knoxville, USA; [email protected]
Ivan Kravchenko
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, USA; [email protected]
Albina Borisevich
Affiliation:
Materials Science and Engineering Division, Oak Ridge National Laboratory, USA; [email protected]
Stephen Jesse
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, USA; [email protected]
Sergei V. Kalinin
Affiliation:
Institute for Functional Imaging of Materials, and Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, USA; [email protected]
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Abstract

New developments in manufacturing and automation, from three-dimensional printing to the “Internet of things,” signify dramatic changes in our society. The push toward quantum materials is driving device fabrication toward atomic precision. Recent results suggest that scanning transmission electron microscopy (STEM) with sub-angstrom scale beams could offer a solution. However, a detailed theoretical understanding of the interaction of the electron beam with solids is needed to form a basis for new technology. This article summarizes the existing literature on electron-beam interactions with solids with a focus on irreversible transformation. We further suggest that the theoretical framework of a two-temperature model developed for fast ion damage in solids could be applicable to predicting the effects of fast electrons. Recent results from STEM-directed epitaxial growth on crystalline–amorphous interfaces are discussed in detail. Finally, perspectives on the development of this field in the near future are offered.

Keywords

scanning transmission electron microscopynanostructureepitaxyelectron irradiationion-solid interactions
Type
Research Article
Information
MRS Bulletin , Volume 42 , Issue 9: Single Atom Fabrication with Beams and Probes , September 2017 , pp. 653 - 659
Copyright
Copyright © Materials Research Society 2017 

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