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Microelectro-mechanical Systems: Technology and Applications

Published online by Cambridge University Press:  31 January 2011

David Bishop ,
Arthur Heuer  and
David Williams
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Extract

Microelectromechanical systems, or MEMS, constitute a group of microdevices that are just beginning to affect many areas of science and technology. In diverse fields including the automotive industry, aeronautics, cellular communications, chemistry, acoustics, and display technologies and other photonic systems, these highly functional devices are making a big name for themselves, despite their diminutive size.

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 282 - 288
Copyright
Copyright © Materials Research Society 2001

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