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Large-Scale Manufacturing of Nanoscale Multilayered Hard Coatings Deposited by Cathodic Arc/Unbalanced Magnetron Sputtering

Published online by Cambridge University Press:  31 January 2011

W.-D. Münz
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Abstract

Nanoscale multilayered (superlattice) hard coatings can be manufactured in a plastic hardness range (HP) between 25GPa and 55 GPa by a combination of cathodic arc evaporation and unbalanced magnetron sputtering (arc bond sputter technology). Using large-scale industrial physical vapor deposition (PVD) equipment and a sufficiently high pumping speed, multilayered coatings can be deposited by simultaneously operating cathodes without special shutter and shielding facilities in a common reactive-gas atmosphere. The efficiency of the process is in many cases identical to that of TiN and CrN. Temperature-resistant, wear-resistant, and corrosion-resistant coatings of various compositions have been produced under industrial conditions. So far, the main applications concentrate on metal-forming and on cutting die steel, Inconel, stainless steel, and titanium. Applications have also been found in the chemical, textile, medical, and automotive industries.

Keywords

anticorrosion propertiescathodic arc/unbalanced magnetron (CA/UBM) sputteringfriction reductionnanoscale multilayersphysical vapor deposition (PVD)superhard coating materialssuperlatticeswear resistance
Type
Research Article
Information
MRS Bulletin , Volume 28 , Issue 3: Superhard Coating Materials , March 2003 , pp. 173 - 179
Copyright
Copyright © Materials Research Society 2003

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