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Enabling graphene-based technologies: Toward wafer-scale production of epitaxial graphene

Published online by Cambridge University Press:  23 November 2012

L.O. Nyakiti ,
V.D. Wheeler ,
N.Y. Garces ,
R.L. Myers-Ward ,
C.R. Eddy Jr.  and
D.K. Gaskill
L.O. Nyakiti
Affiliation:
Electronics Science and Technology Division, US Naval Research Laboratory; [email protected]
V.D. Wheeler
Affiliation:
Electronics Science and Technology Division, US Naval Research Laboratory; [email protected]
N.Y. Garces
Affiliation:
Electronics Science and Technology Division, US Naval Research Laboratory; [email protected]
R.L. Myers-Ward
Affiliation:
Electronics Science and Technology Division, US Naval Research Laboratory; [email protected]
C.R. Eddy Jr.
Affiliation:
Electronics Science and Technology Division, US Naval Research Laboratory; [email protected]
D.K. Gaskill
Affiliation:
Advanced SiC Epitaxial Research Laboratory, US Naval Research Laboratory; [email protected]
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Abstract

Epitaxial graphene (EG) has attracted considerable interest because of its extraordinary properties and ability to be synthesized on the wafer scale. These attributes have enabled EG to be applied in field-effect transistors with extrinsic operating frequencies in the hundreds-of-gigahertz range. Although the quality of EG grown on SiC has improved, there are still obstacles, such as low carrier mobility and large-area thickness nonuniformity, that limit applications in a wide range of truly wafer-scale technologies. In this article, key elements of epitaxial graphene synthesis are highlighted and discussed with regard to impacts on large-area uniformity, structure, and electrical properties. The effects of specific components such as growth-reactor design and substrate quality are examined in an effort to provide a pathway for future advancements in EG production. Finally, key future directions for research in EG are briefly discussed.

Keywords

morphology (111)dislocations (104)electronic material (187)nucleation & growth (363)
Type
Research Article
Information
MRS Bulletin , Volume 37 , Issue 12: Graphene Fundamentals and Functionalities , December 2012 , pp. 1149 - 1157
Copyright
Copyright © Materials Research Society 2012

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