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Advanced recording schemes for electron tomography

Published online by Cambridge University Press:  07 July 2016

Tim Dahmen ,
Patrick Trampert ,
Niels de Jonge  and
Philipp Slusallek
Tim Dahmen
Affiliation:
German Research Center for Artificial Intelligence, Germany; [email protected]
Patrick Trampert
Affiliation:
German Research Center for Artificial Intelligence, Germany; [email protected]
Niels de Jonge
Affiliation:
Leibniz Institute for New Materials, Germany; [email protected]
Philipp Slusallek
Affiliation:
German Research Center for Artificial Intelligence, and Saarland University, Germany; [email protected]
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Abstract

Three-dimensional (3D) scanning transmission electron microscopy (STEM) has become one of the primary tools for analytical characterization in materials science and also finds increasing use in the life sciences. A number of different recording schemes exist for the acquisition of 3D data using STEM, each capturing different spatial frequencies and, thus, different information about the shape of a specimen. In this article, we present and compare different sampling approaches based on images with both large and small depth of field. We highlight the latest contribution to 3D data acquisition, the combined tilt, and focal series. This recording scheme combines the advantages of tilt series-based tomography with 3D data acquisition using a focal series and is particularly beneficial for imaging specimens with a thickness of 1 µm or greater.

Keywords

scanning transmission electron microscopy (STEM)transmission electron microscopy (TEM)devices
Type
Research Article
Information
MRS Bulletin , Volume 41 , Issue 7: Advanced Tomography Techniques for Materials Applications , July 2016 , pp. 537 - 541
Copyright
Copyright © Materials Research Society 2016 

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