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ZnO1-xTex thin films deposited by reactive magnetron co-sputtering: composition, structure and optical properties

Published online by Cambridge University Press:  15 May 2017

O. Sánchez ,
A. Climent ,
M. Fernández Barcia ,
O. Martínez Sacristán  and
M. Hernández-Vélez
O. Sánchez*
Affiliation:
Instituto de Ciencia de Materiales de Madrid (CSIC). Sor Juana Inés de la Cruz, 3, 28049 Madrid. Spain
A. Climent
Affiliation:
Dpto. Física Aplicada Universidad. Autónoma de Madrid, Cantoblanco 28049 Madrid. Spain
M. Fernández Barcia
Affiliation:
Instituto de Ciencia de Materiales de Madrid (CSIC). Sor Juana Inés de la Cruz, 3, 28049 Madrid. Spain Dpto. Física Aplicada Universidad. Autónoma de Madrid, Cantoblanco 28049 Madrid. Spain
O. Martínez Sacristán
Affiliation:
UGdS-Optronlab Group, Universidad de Valladolid, P° de Belén 11, 47011-Valladolid, Spain
M. Hernández-Vélez
Affiliation:
Dpto. Física Aplicada Universidad. Autónoma de Madrid, Cantoblanco 28049 Madrid. Spain
*
†(Email: [email protected])
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Abstract

ZnO1-xTex thin films were deposited by DC reactive magnetron co-sputtering using pure Zn and Te targets. Te atomic concentration in the films ranged from x=0 to 0.33 by adjusting the applied power on the targets or varying the cathode-substrate distance. Chemical composition and crystalline structure were determined by RBS experiments and X-ray Diffraction, respectively. For low Te atomic concentrations (x≤0.04) the deposited ZnO1-xTex films showed a crystalline structure ZnO wurtzite type however, for increasing Te concentration significant broadening and decreasing intensities of the main peaks belonging to pure ZnO films together with some weak peaks characteristic of crystalline Trizinc Tellurate salt have appeared. For the highest x values some non-identified weak peaks beside to some others peaks corresponding to the crystalline phases mentioned above as well as, a broad band probably associated to amorphous TeO2 phase were observed. A preliminary optical characterization of the samples point out the possibility of different electronic transitions within the ZnO band gap.

Keywords

physical vapor deposition (PVD)thin filmoxide
Type
Articles
Information
MRS Advances , Volume 2 , Issue 53: Energy Storage and Conversion , 2017 , pp. 3111 - 3116
Copyright
Copyright © Materials Research Society 2017 

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Footnotes

*

currently at Institute for Complex Materials, IFW Dresden, Helmholtzstr. 20, 01069 Dresden. Germany

References

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