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Study and optimization of the photoluminescence of amorphous silicon carbide thin films

Published online by Cambridge University Press:  16 January 2019

Maricela Meneses ,
Mario Moreno ,
Alfredo Morales ,
Alfonso Torres ,
Pedro Rosales  and
Israel Vivaldo
Maricela Meneses*
Affiliation:
Instituto Nacional de Astrofísica, Óptica y Electrónica, INAOE, Tonantzintla, Puebla72840, México.
Mario Moreno
Affiliation:
Instituto Nacional de Astrofísica, Óptica y Electrónica, INAOE, Tonantzintla, Puebla72840, México.
Alfredo Morales
Affiliation:
Instituto Nacional de Astrofísica, Óptica y Electrónica, INAOE, Tonantzintla, Puebla72840, México. Centro de Investigación en Materiales Avanzados, S.C., CIMAV-Unidad Monterrey, México.
Alfonso Torres
Affiliation:
Instituto Nacional de Astrofísica, Óptica y Electrónica, INAOE, Tonantzintla, Puebla72840, México.
Pedro Rosales
Affiliation:
Instituto Nacional de Astrofísica, Óptica y Electrónica, INAOE, Tonantzintla, Puebla72840, México.
Israel Vivaldo
Affiliation:
Benemerita Universidad Autónoma de Puebla, FCE, BUAP, 72000, México.
*
*(Email: [email protected])
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Abstract:

In this work we report the study of the effect of the deposition parameters on the photoluminescence (PL) intensity of hydrogenated amorphous silicon-carbide (a-SiC:H) films deposited at very low temperature (150 °C) by Plasma Enhanced Chemical Vapor Deposition (PECVD). We have observed that the main deposition parameter that influences the wavelength emission peak is the methane/silane (CH4/SiH4) ratio used for the films deposition, due to a change on the film carbon content. On the other hand the deposition RF power affects the PL intensity, without a change in the PL emission peak. Also we have studied the effect of the film thickness on the PL intensity and we have observed an optimal film thickness.

Keywords

luminescenceplasma-enhanced CVD (PECVD) (deposition)amorphous
Type
Articles
Information
MRS Advances , Volume 3 , Issue 64: International Materials Research Congress XXVII , 2018 , pp. 3905 - 3916
Copyright
Copyright © Materials Research Society 2019 

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References

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