Article contents
Focused Ion Beam Fabrication of SU-8 Waveguide Structures on Oxidized Silicon
Published online by Cambridge University Press: 23 January 2017
Abstract
This work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon substrate using ‘Focused ion beam (FIB) lithography’. From our experimentation it seems that FIB method is practically not suitable for fabricating long SU-8 waveguide structures, rather it is more suitable for nanoscale modification of already fabricated waveguides, such as, to fabricate photonic crystal structures.
- Type
- Articles
- Information
- Copyright
- Copyright © Materials Research Society 2017
References
REFERENCES
- 4
- Cited by