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Flexible surface acoustic wave broadband strain sensors based on ultra-thin flexible glass substrate

Published online by Cambridge University Press:  09 February 2016

Jinkai Chen ,
Wenbo Wang ,
Weipeng Xuan ,
Xiaozhi Wang ,
Shurong Dong ,
Sean Garner ,
Pat Cimo  and
Jikui Luo
Jinkai Chen
Affiliation:
Coll. of Info. Sci. & Electron. Eng., Zhejiang University, 38 Zheda Road, Hangzhou 310027, China.
Wenbo Wang
Affiliation:
Coll. of Info. Sci. & Electron. Eng., Zhejiang University, 38 Zheda Road, Hangzhou 310027, China.
Weipeng Xuan
Affiliation:
Coll. of Info. Sci. & Electron. Eng., Zhejiang University, 38 Zheda Road, Hangzhou 310027, China.
Xiaozhi Wang*
Affiliation:
Coll. of Info. Sci. & Electron. Eng., Zhejiang University, 38 Zheda Road, Hangzhou 310027, China.
Shurong Dong
Affiliation:
Coll. of Info. Sci. & Electron. Eng., Zhejiang University, 38 Zheda Road, Hangzhou 310027, China.
Sean Garner
Affiliation:
Corning Incorporated, One River Front Plaza, Corning, NY 14831, USA
Pat Cimo
Affiliation:
Corning Incorporated, One River Front Plaza, Corning, NY 14831, USA
Jikui Luo*
Affiliation:
Coll. of Info. Sci. & Electron. Eng., Zhejiang University, 38 Zheda Road, Hangzhou 310027, China. Inst. of Renew. Energy & Environ. Technol., Bolton University, Deane Road, Bolton BL3 5AB, UK
*
*Corresponding authors email: [email protected], [email protected]
*Corresponding authors email: [email protected], [email protected]
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Abstract

Flexible SAW devices based on ZnO piezoelectric thin film deposited on ultra-thin flexible glass were fabricated and their performances as a strain sensor have been investigated. The XRD and AFM characterizations showed that the ZnO layers have good crystal quality and smooth surface. The flexible SAW devices show excellent strain sensitivity which increases from ∼87 to ∼137 Hz/με with the increasing ZnO thickness, and the sensors can withstand strains up to ∼3000 με, 4∼6 times larger than those of SAW strain sensors on rigid substrates. The sensors exhibited remarkable stability up to hundreds of times bending under large strains. The effects of environmental variables (temperature, humidity, UV light) on the sensor performance have been investigated. The temperature has a significant effect on the performance of the SAW strain sensor, while humidity and light have limited effect.

Keywords

piezoelectricsensordevices
Type
Articles
Information
MRS Advances , Volume 1 , Issue 21: Nanomaterials and Synthesis , 2016 , pp. 1519 - 1524
Copyright
Copyright © Materials Research Society 2016 

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References

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