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Fatigue behavior of nanoscale Mo/W multilayers on flexible substrates

Published online by Cambridge University Press:  03 June 2019

Fang Wang
Affiliation:
Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang110016, China School of Materials Science and Engineering, University of Science and Technology of China, Shenyang110016, China
Xue-Mei Luo*
Affiliation:
Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang110016, China
Dong Wang
Affiliation:
Institute of Materials Engineering and Institute of Micro- and Nanotechnologies MacroNano®, TU Ilmenau, Gustav-Kirchhoff-Str. 5, 98693Ilmenau, Germany
Peter Schaaf
Affiliation:
Institute of Materials Engineering and Institute of Micro- and Nanotechnologies MacroNano®, TU Ilmenau, Gustav-Kirchhoff-Str. 5, 98693Ilmenau, Germany
Guang-Ping Zhang*
Affiliation:
Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang110016, China
*
*Corresponding authors. E-mails: [email protected], [email protected]
*Corresponding authors. E-mails: [email protected], [email protected]
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Abstract

Fatigue properties of Mo/W multilayers with individual layer thickness (λ) of 5, 20, 50 and 100 nm on flexible polyimide substrates were investigated. The experimental results show that the fatigue resistance increases with decreasing λ from 100 nm to 20 nm, and reaches the maximum at λ=20 nm, and then decreases when further decreasing λ. Fatigue cracks of Mo/W multilayers with different λ were found to propagate along columnar grain boundary in the out-of-plane direction and along the boundary of cluster structures. The enhanced fatigue resistance is attributed to the larger cluster inclination angles and the more tortuous in-plane cracking paths.

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Articles
Copyright
Copyright © Materials Research Society 2019 

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