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A critical role of hydrogen sulfide evolution during MOCVD of single phase thin film tin sulfide using ditertiarybutylsulfide as a less toxic precursor

Published online by Cambridge University Press:  26 February 2018

Andrew J. Clayton ,
Cecile M. E. Charbonneau ,
Peter J. Siderfin  and
Stuart J. C. Irvine
Andrew J. Clayton*
Affiliation:
Centre for Solar Energy Research, College of Engineering, Swansea University, OpTIC, Ffordd William Morgan, St. Asaph Business Park, St. Asaph, Denbighshire, LL17 0JD, UK
Cecile M. E. Charbonneau
Affiliation:
Sêr Solar, College of Engineering, Swansea University, Bay Campus, Crymlyn Burrows, Fabian Way, Swansea, West Glamorgan, SA1 8EN, UK
Peter J. Siderfin
Affiliation:
Centre for Solar Energy Research, College of Engineering, Swansea University, OpTIC, Ffordd William Morgan, St. Asaph Business Park, St. Asaph, Denbighshire, LL17 0JD, UK
Stuart J. C. Irvine
Affiliation:
Centre for Solar Energy Research, College of Engineering, Swansea University, OpTIC, Ffordd William Morgan, St. Asaph Business Park, St. Asaph, Denbighshire, LL17 0JD, UK
*
*(Email: [email protected])

Abstract

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Thin film tin sulphide (SnS) was deposited on to molybdenum (Mo) substrates using metal organic chemical vapor deposition at 470°C using tetraethyltin and ditertiarybutylsulfide as precursors. In situ mass spectroscopy was used to study the exhaust gas species downstream of the reaction zone. The precursor vapor carrier gas was either nitrogen or hydrogen, thin film SnS only forming when the latter was used. Mass spectroscopy determined that hydrogen sulfide was being produced and playing a critical role in the vapor phase reaction process and adsorption of tin and sulfur on to the Mo surface. As-grown grain sizes were determined by scanning electron microscopy and were observed to be large averaging around 2 microns across. X-ray diffraction showed the films to be single phase SnS without any parasitic Sn2S3 or SnS2 phases, with a small amount of MoS2 also being detected.

Keywords

chemical vapor deposition (CVD) (chemical reaction)grain sizethin film
Type
Articles
Information
MRS Advances , Volume 3 , Issue 32: Energy and Sustainability , 2018 , pp. 1849 - 1853
Creative Commons
Creative Common License - CCCreative Common License - BY
This is an Open Access article, distributed under the terms of the Creative Commons Attribution licence (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted re-use, distribution, and reproduction in any medium, provided the original work is properly cited.
Copyright
Copyright © Materials Research Society 2018

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