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On the reproducibility of spray-coated ZnO thin-film transistors

Published online by Cambridge University Press:  13 April 2020

Guilherme R. Lima ,
João P. Braga Open the ORCID record for João P. Braga [Opens in a new window] ,
Giovani Gozzi  and
Lucas Fugikawa-Santos
Guilherme R. Lima
Affiliation:
Physics Department/IBILCE, – São Paulo State University-UNESP, São José Do Rio Preto, SP 15054-000, Brazil
João P. Braga*
Affiliation:
Physics Department/IBILCE, – São Paulo State University-UNESP, São José Do Rio Preto, SP 15054-000, Brazil
Giovani Gozzi
Affiliation:
Physics Department/IGCE, – São Paulo State University-UNESP, Av. 24A, 1515, Rio Claro, SP 13506-900, Brazil
Lucas Fugikawa-Santos
Affiliation:
Physics Department/IGCE, – São Paulo State University-UNESP, Av. 24A, 1515, Rio Claro, SP 13506-900, Brazil
*
*(Email: [email protected])
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Abstract

Recent studies have shown spray-pyrolysis is a low-cost, simple and efficient technique for deposition of metal oxide semiconductors (such as zinc oxide) as the active layer of thin-film transistors (TFTs). However, to allow the translation from laboratory scale to industry the reproducibility of such method needs to be evaluated. We present herein a representative study concerning the reproducibility and uniformity of spray-coated ZnO TFTs using several devices, from different production batches, following the same fabrication protocol. We demonstrate that it is possible to obtain transistors with high performance and reproducibility by controlling the most relevant deposition factors, corroborated by a low deviation rate (below 10%) from the characteristic TFT parameters (mobility in saturation, threshold voltage and on/off ratio), which is compatible to commonly available commercial electronic devices.

Keywords

thin filmspray pyrolysissolution depositionsemiconducting
Type
Articles
Information
MRS Advances , Volume 5 , Issue 35-36: Electronic, Photonic and Magnetic Materials , 2020 , pp. 1859 - 1866
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Copyright
Copyright © Materials Research Society 2020

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