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Investigation of Acoustic Cavitation in Aqueous Surfactant Solutions for Cleaning Applications

Published online by Cambridge University Press:  03 May 2016

Mingrui Zhao ,
Anfal Alobeidli ,
Xi Chen ,
Petrie Yam ,
Claudio Zanelli ,
Sharyl Maraviov ,
Mona Nagel ,
Farhang Shadman  and
Manish Keswani
Mingrui Zhao
Affiliation:
Chemical and Environmental Engineering, University of Arizona, 1133 E. James E. Rogers Way, Tucson, AZ 85721, U.S.A.
Anfal Alobeidli
Affiliation:
Materials Science and Engineering, University of Arizona, 1235 E. James E. Rogers Way, Tucson, AZ 85721, U.S.A.
Xi Chen
Affiliation:
Onda Corporation, 1290 Hammerwood Ave, Sunnyvale, CA 94089, U.S.A.
Petrie Yam
Affiliation:
Onda Corporation, 1290 Hammerwood Ave, Sunnyvale, CA 94089, U.S.A.
Claudio Zanelli
Affiliation:
Onda Corporation, 1290 Hammerwood Ave, Sunnyvale, CA 94089, U.S.A.
Sharyl Maraviov
Affiliation:
PCT Systems Inc., 49000 Milmont Dr, Fremont, CA 94538, U.S.A.
Mona Nagel
Affiliation:
Carl Zeiss, Carl-Zeiss-Strasse 22, 73447 Oberkochen, Germany.
Farhang Shadman
Affiliation:
Chemical and Environmental Engineering, University of Arizona, 1133 E. James E. Rogers Way, Tucson, AZ 85721, U.S.A.
Manish Keswani*
Affiliation:
Materials Science and Engineering, University of Arizona, 1235 E. James E. Rogers Way, Tucson, AZ 85721, U.S.A.
*
*Corresponding author, E-mail: [email protected]; Fax: +1-520-621-8059
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Abstract

Surfactants are commonly used as additives in cleaning formulations during acoustic cleaning of semiconductor surfaces. Since surfactants are surface active, they can affect cavitation characteristics and, therefore, influence cleaning efficiency and damage to the surface. In this work, stable and transient cavitation pressures were characterized in Triton® X-100 containing aqueous solutions subjected to single frequency and dual-frequency sound fields using acoustic emission measurements. The hydrophone based technique allowed quantitative measurements of the absolute pressure values from stable and transient cavitation fields. The ratio of stable cavitation pressure to transient cavitation pressure under different conditions indicated that surfactants can play an important role in reducing feature damage while maintaining particle removal efficiency. Damage studies conducted on aluminum coated glass samples further confirmed these results.

Keywords

acousticdefectsparticulate
Type
Articles
Information
MRS Advances , Volume 1 , Issue 31: Nanotechnology , 2016 , pp. 2255 - 2260
Copyright
Copyright © Materials Research Society 2016 

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References

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