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Influence of Al, In codoping in enhancing the Figure of Merit of ZnOthin films for TCO Applications

Published online by Cambridge University Press:  19 January 2016

Vinoth Kumar Jayaraman ,
Arturo Maldonado Alvarez  and
Maria De la Luz Olvera Amador
Vinoth Kumar Jayaraman*
Affiliation:
Department of Electrical Engineering, Centro de Investigación y de Estudios Avanzados del IPN (CINVESTAV-IPN), Apartado Postal 14740, México City, México.
Arturo Maldonado Alvarez
Affiliation:
Department of Electrical Engineering, Centro de Investigación y de Estudios Avanzados del IPN (CINVESTAV-IPN), Apartado Postal 14740, México City, México.
Maria De la Luz Olvera Amador
Affiliation:
Department of Electrical Engineering, Centro de Investigación y de Estudios Avanzados del IPN (CINVESTAV-IPN), Apartado Postal 14740, México City, México.
*
*(Email: [email protected])
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Abstract

AIZO (Al and In codoped ZnO) thin films were deposited on soda lime glasssubstrates by the ultrasonic spray pyrolysis (USP) technique. The sprayingsolution was prepared from zinc acetate dihydrate, aluminum acetyl acetonate andindium acetate. Depositions were carried out at three different temperatures,425, 450 and 475 °C. Structural, morphological, optical and electricalproperties were examined with respected to the deposition temperatures. All AIZOfilms grown with (002) preferential orientation confirmed from X-ray diffractionanalysis. Hexagonal nanostructures were observed from Scanning electronmicroscopy (SEM) analysis. Minimum electrical resistivity of 2.52x10-3 Ω-cm was achieved for AIZO films.

Keywords

x-ray diffraction (XRD)dopantspray pyrolysis
Type
Articles
Information
MRS Advances , Volume 1 , Issue 2: Energy and Sustainability , 2016 , pp. 133 - 139
Copyright
Copyright © Materials Research Society 2016 

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