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Conformality of PVD shell layers on GLAD-nanorods investigated by Monte Carlo simulations

Published online by Cambridge University Press:  27 August 2020

Mesut Yurukcu Open the ORCID record for Mesut Yurukcu [Opens in a new window] ,
Fatma M. Yurtsever ,
Serkan Demirel  and
Tansel Karabacak
Mesut Yurukcu*
Affiliation:
Department of Physics and Astronomy, University of Arkansas at Little Rock, Little Rock, AR, 72204USA; [email protected]
Fatma M. Yurtsever
Affiliation:
Department of Chemistry, University of Arkansas at Little Rock, Little Rock, AR, 72204USA; [email protected]
Serkan Demirel
Affiliation:
College of Computer and Information Sciences, Regis University, Denver, Colorado80221USA; [email protected]
Tansel Karabacak
Affiliation:
Department of Physics and Astronomy, University of Arkansas at Little Rock, Little Rock, AR, 72204USA; [email protected]
*
*Correspondence: [email protected]
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Abstract

The quality of the shell coating around nanorods is critical in device applications. Conventional physical vapor deposition (PVD) techniques can be utilized for highly conformal shell coating formation in core-shell structure devices. To identify scalable fabrication techniques for conformal shell coatings, Monte Carlo (MC) simulations of PVD growth were performed under different atomic flux distributions and angles on arrays of glancing angle deposition (GLAD) nanorods, which were also generated by MC simulations. We investigated the conformality of PVD films (shell) around GLAD rod arrays (core) and analyzed the thickness uniformity of the shell layer across the sidewalls of rods. Our results show that Angular Flux-Normal Angle (A-NAD), which might correspond to high-pressure sputter deposition at normal incidence (HIPS at θ = 0o) can generate better conformal shell coating compared to others. In Uniform Flux-Normal Angle technique (U-NAD), which corresponds to a thermal evaporation deposition, the growth suffers from poor sidewall coverage. In addition, introducing a small angle to the flux also improves the shell conformality. Therefore, high-pressure sputter deposition technique is expected to provide superior conformality for a catalyst or semiconductor coating around base nanorods, for example for fuel cell and solar cell applications, with the help of obliquely incident atoms of the HIPS flux.

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MRS Advances , Volume 5 , Issue 43: Nanoscale and Quantum Materials , 2020 , pp. 2241 - 2248
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Copyright © Materials Research Society 2020

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References

Wang, J., Du, N., Zhang, H., Yu, J., and Yang, D., “Cu-Sn Core-Shell Nanowire Arrays as Three-Dimensional Electrodes for Lithium-Ion Batteries,” J. Phys. Chem., no. 115, pp. 23620–23624, (2011).Google Scholar
Kariuki, N. N. et al. , “SAD-GLAD Pt-Ni@Ni Nanorods as Highly Active Oxygen Reduction Reaction Electrocatalysts,” ACS Catal., vol. 6, no. 6, pp. 3478–3485, (2016).CrossRefGoogle Scholar
Begum, M. et al. , “Pt-Ni/WC Alloy Nanorods Arrays as ORR Catalyst for PEM Fuel Cells,” ECS Trans., vol. 80, no. 8, pp. 919–925, (2017).CrossRefGoogle Scholar
Yurtsever, F. M., Begum, M., Yurukcu, M., and Karabacak, T., “Stacked core-shell nanorod array electrocatalyst by a HIPS-GLAD method for enhanced ORR in PEMFCs,” in Abstracts Of Papers Of The American Chemical Society, vol. 252, (2016).Google Scholar
Kariukia, N., Yurtsever, M., Begum, Fatma M., Yurukcu, M., and Cansizoglu, D. J., Karabacak, Mehmet, Myers, Tansel, “Glad-SAD Pt-Ni Alloy/Ni Nanorods As Highly Active Oxygen Reduction Reaction Electrocatalysts,” in ECS Meeting Abstracts, p. 1556, (2015).CrossRefGoogle Scholar
Khudhayer, W. J., Kariuki, N., Myers, D. J., Shaikh, A. U., and Karabacak, T., “GLAD Cr Nanorods Coated with SAD Pt Thin Film for Oxygen Reduction Reaction,” J. Electrochem. Soc., vol. 159, no. 6, pp. B729–B736, (2012).CrossRefGoogle Scholar
Keles, F., Cansizoglu, H., Badraddin, E. O., Brozak, M. P., Watanabe, F., and Karabacak, T., “HIPS-GLAD core shell nanorod array photodetectors with enhanced photocurrent and reduced dark current,” Mater. Res. Express, vol. 3, no. 10, pp. 1–8, (2016).CrossRefGoogle Scholar
Cansizoglu, H., Cansizoglu, M. F., Watanabe, F., and Karabacak, T., “Enhanced photocurrent and dynamic response in vertically aligned In 2S3/Ag core/shell nanorod array photoconductive devices,” ACS Appl. Mater. Interfaces, vol. 6, no. 11, pp. 8673–8682, (2014).CrossRefGoogle Scholar
Creighton, J. R. and Ho, P., “Chapter 1 Introduction to Chemical Vapor Deposition (CVD),” Chem. Vap. Depos., no. January 2001, pp. 1–13, (2001).Google Scholar
Sabbar, A. et al. , “Growth and Characterization of SiGe on c-Plane Sapphire Using a Chemical Vapor Deposition System,” J. Electron. Mater., (2020).CrossRefGoogle Scholar
Johnson, R. W., Hultqvist, A., and Bent, S. F., “A brief review of atomic layer deposition: From fundamentals to applications,” Mater. Today, vol. 17, no. 5, pp. 236–246, (2014).CrossRefGoogle Scholar
Mahan, J. E., Physical Vapor Deposition of Thin Films. (2000).Google Scholar
Khudhayer, W. J., Shaikh, A. U., and Karabacak, T., “Periodic Pt Nanorod Arrays with Controlled Porosity for Oxygen Reduction Reaction,” Nanosci. Nanotechnol. Lett., vol. 4, no. 10, pp. 999–1007, (2012).CrossRefGoogle Scholar
Tian, R. et al. , “Drastically enhanced high-rate performance of carbon-coated LiFePO 4 nanorods using a green chemical vapor deposition (CVD) method for lithium ion battery: A selective carbon coating process,” ACS Appl. Mater. Interfaces, vol. 7, no. 21, pp. 11377–11386, (2015).CrossRefGoogle Scholar
Haider, A., Cansizoglu, H., Cansizoglu, M. F., Karabacak, T., Okyay, A. K., and Biyikli, N., “Enhanced photoresponse of conformal TiO 2 /Ag nanorod array-based Schottky photodiodes fabricated via successive glancing angle and atomic layer deposition,” J. Vac. Sci. Technol. A Vacuum, Surfaces, Film., vol. 33, no. 1, p. 01A110, (2014).Google Scholar
Madou, M. J., Manufacturing Techniques for Microfabrication and Nanotechnology. CRC Press, (2011).CrossRefGoogle Scholar
Yurukcu, M. et al. , “The effect of the core/shell nanostructure arrays on PEM fuel cells: a short review,” Mater. Sci. Eng. Int. J., vol. 2, no. 2, pp. 58–64, Oct. (2018).Google Scholar
Yurtsever, F. M., Begum, M., Yurukcu, M., Watanabe, F., and Karabacak, T., “Stacked and Core–Shell Pt:Ni/WC Nanorod Array Electrocatalyst for Enhanced Oxygen Reduction Reaction in Polymer Electrolyte Membrane Fuel Cells,” ACS Appl. Energy Mater., vol. 1, no. 11, pp. 6115–6122, (2018).CrossRefGoogle Scholar
Barranco, A., Borras, A., Gonzalez-Elipe, A. R., and Palmero, A., “Perspectives on oblique angle deposition of thin films: From fundamentals to devices,” Prog. Mater. Sci., vol. 76, pp. 59–153, (2016).CrossRefGoogle Scholar
Karabacak, T. and Lu, T.-M., “Enhanced step coverage by oblique angle physical vapor deposition,” J. Appl. Phys., vol. 97, no. 12, pp. 124504-1–8, (2005).CrossRefGoogle Scholar
Kariuki, N., Khudhayer, W., Karabacak, T., and Myers, D., “GLAD Pt-Ni alloy nanorods for oxygen reduction reaction,” ACS Catal., vol. 3, pp. 3123–3132, (Nov. 2013).CrossRefGoogle Scholar
Kroese, D. P., Brereton, T., Taimre, T., and Botev, Z. I., “Why the Monte Carlo method is so important today,” Wiley Interdiscip. Rev. Comput. Stat., vol. 6, no. 6, pp. 386–392, (2014).CrossRefGoogle Scholar
Patzig, C., Karabacak, T., Fuhrmann, B., and Rauschenbach, B., “Glancing angle sputter deposited nanostructures on rotating substrates: Experiments and simulations,” J. Appl. Phys., vol. 104, no. 9, pp. 094318-1–10, (2008).CrossRefGoogle Scholar
Cansizoglu, H., Yurukcu, M., Cansizoglu, M. F., and Karabacak, T., “Investigation of physical vapor deposition techniques of conformal shell coating for core/shell structures by Monte Carlo simulations,” Thin Solid Films, vol. 583, no. 1, (2015).Google Scholar
Yurukcu, M., Cansizoglu, H., Cansizoglu, M. F., and Karabacak, T., “Conformality of PVD shell layers on vertical arrays of rods with different aspect ratios investigated by Monte Carlo simulations,” in MRS Advances, vol. 2, no. 8, pp. 465–470, (2017).CrossRefGoogle Scholar
Karabacak, T., Lu, T.-M., and Karabacak, Tansel, Lu, T.-M., “Shadowing growth and physical self-assembly of 3D columnar structures,” in Handbook of Theoretical and Computational Nanotechnology, Nanocompos, Rieth, M. and Schommers, W., Ed. Stevenson Ranch: Scientific Publishers, pp. 729–779 (2005).Google Scholar