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Quantitative X-ray microanalysis of thin specimens in the transmission electron microscope; a review

Published online by Cambridge University Press:  05 July 2018

G. W. Lorimer
G. W. Lorimer*
Affiliation:
University of Manchester/UMIST, Department of Metallurgy and Materials Science, Grosvenor Street,Manchester M1 7HS
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Abstract

In a thin specimen X-ray absorption and fluorescence can, to a first approximation, be ignored and the observed X-ray intensity ratios, IA/IB, can be converted into weight fraction ratios, , can be converted into weight fraction ratios, CA/CB, by multiplying by a constant , by multiplying by a constant kAB;

kAB values can be calculated or determined experimentally. The major correction which may have to be made to the calculated weight fraction ratio is for X-ray absorption within the specimen. The activated volume for analysis in a thin specimen is approximately 100 000 × less than in a bulk sample. Beam spreading within the specimen can be estimated using a simple formula based on a single elastic scattering event at the centre of the specimen. Examples are given of the application of the technique to obtain both qualitative and quantitative analyses from thin mineral specimens. The minimum detectable mass and the minimum mass fraction which can be measured using the technique are estimated.

Keywords

X-ray microanalysistransmission electron microscopythin specimens.
Type
Electron Microscopy in Mineralogy and Petrology
Information
Mineralogical Magazine , Volume 51 , Issue 359 , March 1987 , pp. 49 - 60
Copyright
Copyright © The Mineralogical Society of Great Britain and Ireland 1987

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