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Multiscale finite-element models for predicting spontaneous adhesion in MEMS

Published online by Cambridge University Press:  15 November 2010

Raffaele Ardito ,
Alberto Corigliano  and
Attilio Frangi
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Abstract

This paper aims at the formulation of a computational model for the simulation of adhesion phenomena in micro-electro-mechanical systems (MEMS) under various environmental conditions. The present approach is based on finite-element (FE) simulations of a representative part of the surface. The micro-scale analyses include the contact behaviour of the asperities and different “proximity interactions” like Van der Waals and capillary forces. The model is first validated in the simple case of a sphere over a flat surface and then applied to a realistic surface sample.

Keywords

Multi-scale analysisadhesive energyMEMSMicrosystèmesélectro-mécaniques (MEMS)adhésion spontanéeeffets de capillaritéforce de Van der Waals
Type
Research Article
Information
Mechanics & Industry , Volume 11 , Issue 3-4: Giens 2009 , May 2010 , pp. 177 - 182
Copyright
© AFM, EDP Sciences 2010

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