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High-precision small-scale laser focal spot measurements
Published online by Cambridge University Press: 06 February 2013
Abstract
In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 µm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.
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- Copyright © Cambridge University Press 2013
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