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Excimer laser plasma to control laser pulse duration
Published online by Cambridge University Press: 09 March 2009
Abstract
An injection-locking excimer laser beam with a pulse duration of 25 ns is focused on the surface of a polymide film. The laser beam that passes through the etching film is shorter than the original one. By optimizing the thickness of the film and the beam powerdensity, a pulse with a 3-ns pulse duration can be obtained using this switch technology.
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